Microstructure and electrical property of tantalum oxynitride thin films prepared using high-power impulse reactive magnetron sputtering

Structure and Electrical Property of CuInS2 Thin Films Deposited by DC Reactive Magnetron Sputtering

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2011.01287 ◽

2011 ◽

Vol 26 (12) ◽

pp. 1287-1292 ◽

Cited By ~ 1

Author(s):

Chang YAN ◽

Fang-Yang LIU ◽

Yan-Qing LAI ◽

Yi LI ◽

Jie LI ◽

...

Keyword(s):

Thin Films ◽

Electrical Property ◽

Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

Role of carbon in the formation of hard Ge1−xCx thin films by reactive magnetron sputtering

Physica B Condensed Matter ◽

10.1016/j.physb.2011.01.077 ◽

2011 ◽

Vol 406 (13) ◽

pp. 2658-2662 ◽

Cited By ~ 8

Author(s):

Chaoquan Hu ◽

Liang Qiao ◽

Hongwei Tian ◽

Xianyi Lu ◽

Qing Jiang ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Fabrication of MgAl$_{2}$O$_{4}$ Thin Films on Ferromagnetic Heusler Alloy Fe$_{2}$CrSi by Reactive Magnetron Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.02bm04 ◽

2012 ◽

Vol 51 (2) ◽

pp. 02BM04 ◽

Cited By ~ 2

Author(s):

Naoto Fukatani ◽

Keima Inagaki ◽

Kenichiro Mari ◽

Hirohito Fujita ◽

Tetsuta Miyawaki ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Heusler Alloy ◽

Physicochemical and structural characteristics of TiC and VC thin films deposited by DC reactive magnetron sputtering

Journal of Materials Science ◽

10.1007/s10853-010-4364-0 ◽

2010 ◽

Vol 45 (18) ◽

pp. 4994-5001 ◽

Cited By ~ 8

Author(s):

C. Aguzzoli ◽

C. A. Figueroa ◽

G. V. Soares ◽

I. J. R. Baumvol

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Structural Characteristics ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

Electronic properties of Cr1−xAlxN thin films deposited by reactive magnetron sputtering

Thin Solid Films ◽

10.1016/s0040-6090(02)00830-1 ◽

2002 ◽

Vol 420-421 ◽

pp. 312-317 ◽

Cited By ~ 39

Author(s):

R Sanjinés ◽

O Banakh ◽

C Rojas ◽

P.E Schmid ◽

F Lévy

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Electronic Properties ◽

Properties of nickel oxide thin films deposited by RF reactive magnetron sputtering

Thin Solid Films ◽

10.1016/s0040-6090(02)00654-5 ◽

2002 ◽

Vol 420-421 ◽

pp. 54-61 ◽

Cited By ~ 103

Author(s):

Y.M. Lu ◽

W.S. Hwang ◽

J.S. Yang ◽

H.C. Chuang

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Nickel Oxide ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Nickel Oxide Thin Films

Structure and optical properties of Cd-substituted ZnO (Zn1−x Cd x O) thin films synthesized by the dc reactive magnetron sputtering

Applied Physics A ◽

10.1007/s00339-014-8451-y ◽

2014 ◽

Vol 117 (2) ◽

pp. 895-900 ◽

Cited By ~ 3

Author(s):

Jinghai Yang ◽

Yonggao Yue ◽

Yingrui Sui ◽

Yan Cao ◽

Maobin Wei ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

Cu 2 Si x Sn 1− x S 3 Thin Films Prepared by Reactive Magnetron Sputtering For Low-Cost Thin Film Solar Cells

Chinese Physics Letters ◽

10.1088/0256-307x/28/10/108801 ◽

2011 ◽

Vol 28 (10) ◽

pp. 108801 ◽

Cited By ~ 4

Author(s):

Chang Yan ◽

Fang-Yang Liu ◽

Yan-Qing Lai ◽

Jie Li ◽

Ye-Xiang Liu

Keyword(s):

Thin Film ◽

Thin Films ◽

Solar Cells ◽

Magnetron Sputtering ◽

Low Cost ◽

Thin Film Solar Cells ◽

Growth of Y2O2S:Eu Thin Films by Reactive Magnetron Sputtering and Electroluminescent Characteristics

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.5601 ◽

1993 ◽

Vol 32 (Part 1, No. 12A) ◽

pp. 5601-5602 ◽

Cited By ~ 1

Author(s):

Kunihiro Sowa ◽

Masami Tanabe ◽

Seigo Furukawa ◽

Yoichiro Nakanishi ◽

Yoshinori Hatanaka

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Room temperature deposition of crystalline HfN thin films by DC reactive magnetron sputtering

Materials Today Proceedings ◽

10.1016/j.matpr.2021.03.462 ◽

2021 ◽

Author(s):

Wuttichai Phae-ngam ◽

Tossaporn Lertvanithphol ◽

Chanunthorn Chananonnawathorn ◽

Rattanachai Kowong ◽

Mati Horprathum ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Room Temperature ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Temperature Deposition