INFLUENCE OF DEPOSITION PARAMETERS ON THE STRUCTURE AND THERMAL STABILITY OF Ti-Al-N COATINGS PRODUCED BY REACTIVE MAGNETRON SPUTTERING
High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes)
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2015 ◽
Vol 19
(2)
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pp. 105-112
2010 ◽
Vol 56
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pp. 1176-1179
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2008 ◽
Vol 202
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pp. 2169-2175
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2000 ◽
Vol 9
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pp. 212-218
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pp. 1-7
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Vol 9
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Vol 6
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pp. 31-40