Defect reduction in GaAs grown by molecular beam epitaxy using different superlattice structures

1986 ◽  
Vol 49 (15) ◽  
pp. 942-944 ◽  
Author(s):  
S. M. Bedair ◽  
T. P. Humphreys ◽  
N. A. El‐Masry ◽  
Y. Lo ◽  
N. Hamaguchi ◽  
...  
1990 ◽  
Vol 8 (2) ◽  
pp. 1013-1019 ◽  
Author(s):  
K. A. Harris ◽  
T. H. Myers ◽  
R. W. Yanka ◽  
L. M. Mohnkern ◽  
R. W. Green ◽  
...  

2002 ◽  
Vol 80 (2) ◽  
pp. 216-218 ◽  
Author(s):  
D. Huang ◽  
M. A. Reshchikov ◽  
F. Yun ◽  
T. King ◽  
A. A. Baski ◽  
...  

2001 ◽  
Vol 87 (3) ◽  
pp. 227-236 ◽  
Author(s):  
E. Iliopoulos ◽  
K.F. Ludwig ◽  
T.D. Moustakas ◽  
Ph. Komninou ◽  
Th. Karakostas ◽  
...  

1996 ◽  
Vol 69 (1) ◽  
pp. 82-84 ◽  
Author(s):  
Zhonghai Yu ◽  
S. L. Buczkowski ◽  
N. C. Giles ◽  
T. H. Myers

1991 ◽  
Vol 240 ◽  
Author(s):  
E. L. Allen ◽  
C. J. Pass ◽  
M. D. Deal ◽  
J. D. Plummer ◽  
V. F. K. Chia

ABSTRACTUndoped AlAs/AlxGa1−xAs superlattice structures were grown by molecular beam epitaxy and annealed under Si3N4, SiO2 or WNX encapsulant films, both with and without the presence of implanted Sn. Enhancement of the Al-Ga interdiffusion coefficient occurred under the Si3N4 film due to in-diffusion of Si. Enhancement was even greater during diffusion of the Sn implant under both Si3N4 and SiO2. Underneath the WNX film, however, interdiffusion was suppressed even in the presence of Sn. We simulated these results with SUPREM IV and show that both the Fermi level effect and vacancy injection from the cap are necessary to cause significant enhancement of Al-Ga superlattice disordering.


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