scholarly journals Analysis of thermoelastic damping limited quality factor and critical dimensions of circular plate resonators based on axisymmetric and non-axisymmetric vibrations

AIP Advances ◽  
2021 ◽  
Vol 11 (3) ◽  
pp. 035108
Author(s):  
Resmi R ◽  
V. Suresh Babu ◽  
M. R. Baiju
Keyword(s):  
Quality Factor ◽  
Circular Plate ◽  
Thermoelastic Damping ◽  
Critical Dimensions

scholarly journals A Study on the Trimming Effects on the Quality Factor of Micro-Shell Resonators Vibrating in Wineglass Modes

Micromachines ◽  
2019 ◽  
Vol 10 (10) ◽  
pp. 695
Author(s):  
Lu ◽  
Xi ◽  
Xiao ◽  
Shi ◽  
Zhuo ◽  
...  
Keyword(s):  
Finite Element Method ◽  
Quality Factor ◽  
Second Harmonic ◽  
Great Influence ◽  
Fem Simulation ◽  
Q Factor ◽  
Thermoelastic Damping ◽  
Frequency Trimming ◽  
Quality Factor Q ◽  
Anchor Loss

Frequency trimming based on mass and stiffness modification is an important post-fabrication process for micro-shell resonators (MSRs). However, the trimming effects on the quality factor are seldom studied, although they may have great influence on the performance of the resonator. This paper presents a study on the quality factor (Q-factor) variation of trimmed micro-shell resonators (MSR). Thermoelastic damping (QTED) and anchor loss (Qanchor) are found to be the dominant energy loss mechanisms resulting in the reduction of the overall Q-factor, according to finite element method (FEM). The effects of different trimming methods on QTED and Qanchor are studied here, respectively. It is found that trimming grooves ablated in the rim of the resonator can cause a ~1–10% reduction of QTED, and the length of trimming groove is positively related to the reduction of QTED. The reduction of QTED caused by the mass adding process is mainly related to the thermal expansion coefficient and density of the additive and contact area between the resonator and additive masses. Besides, the first and second harmonic errors caused by asymmetrical trimming can cause a 10–90% reduction of Qanchor. Finally, trimming experiments were conducted on different resonators and the results were compared with FEM simulation. The work presented in this paper could help to optimize the trimming process of MSRs.

scholarly journals Thermoelastic Damping in Vibrating Beam Accelerometer: A New Thermoelastic Finite Element Approach

2006 ◽  
Author(s):  
S. Lepage ◽  
O. Le Traon ◽  
I. Klapka ◽  
S. Masson ◽  
J. C. Golinval
Keyword(s):  
Finite Element ◽  
Quality Factor ◽  
Element Model ◽  
Analytical Models ◽  
Navigation Systems ◽  
Thermoelastic Damping ◽  
Quality Factors ◽  
Inertial Navigation Systems ◽  
Element Approach ◽  
Experimental Values

In order to respond to the demand of accurate miniature inertial navigation systems, ONERA has been working on the design of a vibrating beam accelerometer called the Vibrating Inertial Accelerometer (VIA). The accuracy of the VIA is directly related to the thermoelastic quality factor of its sensitive element, which is a beam made of quartz. In this work, thermo-piezoelectric finite element analyses of the beam are carried out in order to determine its thermoelastic quality factor. These finite element results are compared to the analytical and experimental quality factors. Due to their inherent restrictive assumptions, analytical models overestimate the quality factor while the finite element results are in good agreement with the experimental values. As the finite element model allows to take into account the real geometry of the beam and the piezoelectricity of the material, it allows to quantify more precisely the thermoelastic quality factor.

Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping

2013 ◽  
Vol 102 (7) ◽  
pp. 071901 ◽  
Author(s):  
Hadi Najar ◽  
Amir Heidari ◽  
Mei-Lin Chan ◽  
Hseuh-An Yang ◽  
Liwei Lin ◽  
...  
Keyword(s):  
Quality Factor ◽  
Thermoelastic Damping ◽  
Micromechanical Resonators

Thermoelastic Damping Based Design, Sensitivity Study and Demonstration of a Functional Hybrid Gyroscope Resonator for High Quality Factor

2021 ◽  
Vol 29 (1) ◽  
pp. 70-96
Author(s):  
N.G. Sharma ◽  
◽  
Sundararajan T. ◽  
G.S. Singh ◽  
◽  
...  
Keyword(s):  
Thin Film ◽  
Quality Factor ◽  
Sensitivity Study ◽  
Fused Silica ◽  
High Quality Factor ◽  
Q Factor ◽  
Thermoelastic Damping ◽  
High Quality ◽  
Field Problem ◽  
Macro Scale

The most critical element of Hemispherical Resonator Gyroscope (HRG) is the high quality factor (Q-factor) mechanical resonator. This paper discusses the role of thermoelastic damping (TED) on effective Q-factor. Finite element method (FEM) is used to solve this highly coupled field problem involving vibration, solid mechanics, heat transfer and thermodynamics. The major contribution of this paper is the sensitivity analysis of the effect of material property, operating temperature and dimensions to arrive at macro scale resonator configuration. Hybrid hemispherical-cylindrical configuration is proposed by studying the performance parameters such as effective mass and angular gain.The uniqueness of the present work is the sensitivity study of ultra thin film coating (volume fraction of 0.01%), coating variations and different coating configurations. The coating can reduce the Q-factor by a few orders compared to uncoated shell. It has been found that coating material selection and coating configuration are very important factors. Another significance of the present work is the realization and detailed characterization of the hybrid fused silica resonator. Thin film gold coating is done on the 3D surfaces of the realized precision resonator. Detailed coating characterization is carried out using sophisticated instruments. Very fine balancing to the order of a few mHz is achieved after coating. Q-factor measurement of the coated resonator is carried out using LDV and achieved a few millions in the final functional hybrid resonator.

Thermoelastic Damping of the Axisymmetric Vibration of Laminated Trilayered Circular Plate Resonators

2013 ◽  
Vol 313-314 ◽  
pp. 600-603 ◽  
Author(s):  
Yu Xin Sun ◽  
Yan Jiang ◽  
Jia Ling Yang
Keyword(s):  
Boundary Conditions ◽  
Circular Plate ◽  
Plate Theory ◽  
Axisymmetric Vibration ◽  
Laminated Plate ◽  
Thermoelastic Damping ◽  
Governing Equations ◽  
Out Of Plane ◽  
Laminated Circular Plate ◽  
Thermoelastic Problems

In this paper, thermoelastic damping of the axisymmetric vibration of laminated circular plate resonators will be discussed. Based on the classical laminated plate theory assumptions, the governing equations of coupled thermoelastic problems are established for axisymmetric out-of-plane vibration of trilayered circular plate with fully clamped boundary conditions. The analytical expression for thermoelastic damping is obtained and the accuracy is verified through comparison with FEM results.

Sign in / Sign up

Export Citation Format

Share Document