Experimental results of 40 kW, 1 MHz solid state high frequency power supply with inductively coupled plasma
2005 ◽
Vol 20
(2)
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pp. 361-369
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2017 ◽
Vol 823
◽
pp. 012037
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2006 ◽
Vol 32
(0)
◽
pp. 83-90
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Keyword(s):