Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations

2019 ◽  
Vol 58 (2) ◽  
pp. 434-447
Author(s):  
Tae-Sun Yu ◽  
Tae-Eog Lee
Keyword(s):  
Delay Analysis ◽  
Cluster Tools ◽  
And Control

Time-Delay Analysis and Control for Electro-Optical Tracking Servo System

2016 ◽  
Vol 13 (5) ◽  
pp. 3436-3443
Author(s):  
Wei Ji ◽  
Xiangli Meng ◽  
Bo Xu ◽  
Dean Zhao
Keyword(s):  
Time Delay ◽  
Servo System ◽  
Optical Tracking ◽  
Delay Analysis ◽  
And Control

scholarly journals Scheduling and Control of Start-up Process for Time-Constrained Single-Arm Cluster Tools with Parallel Chambers

2018 ◽  
Vol 51 (7) ◽  
pp. 251-256
Author(s):  
FaJun Yang ◽  
Yan Qiao ◽  
KaiZhou Gao ◽  
NaiQi Wu ◽  
YuTing Zhu ◽  
...  
Keyword(s):  
Start Up ◽  
Cluster Tools ◽  
And Control

Control of Metal Alloy Oxidation with Electric Fields

1973 ◽  
Vol 31 ◽  
pp. 164-165
Author(s):  
R. R. Dils ◽  
P. S. Follansbee
Keyword(s):  
Electric Fields ◽  
Oxidation Process ◽  
Base Alloy ◽  
Oxide Surface ◽  
Platinum Electrodes ◽  
Insulating Layer ◽  
Iron Base Alloy ◽  
Alloy Oxidation ◽  
Aluminum Oxide Layer ◽  
And Control

Electric fields have been applied across oxides growing on a high temperature alloy and control of the oxidation of the material has been demonstrated. At present, three-fold increases in the oxidation rate have been measured in accelerating fields and the oxidation process has been completely stopped in a retarding field.The experiments have been conducted with an iron-base alloy, Pe 25Cr 5A1 0.1Y, although, in principle, any alloy capable of forming an adherent aluminum oxide layer during oxidation can be used. A specimen is polished and oxidized to produce a thin, uniform insulating layer on one surface. Three platinum electrodes are sputtered on the oxide surface and the specimen is reoxidized.

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