A technique for exciting surface acoustic waves onto nonpiezoelectric materials

1982 ◽  
Vol 44 (4) ◽  
pp. 85-88 ◽  
Author(s):  
Masaru Hayama ◽  
Kohji Toda
Author(s):  
Kemining W. Yeh ◽  
Richard S. Muller ◽  
Wei-Kuo Wu ◽  
Jack Washburn

Considerable and continuing interest has been shown in the thin film transducer fabrication for surface acoustic waves (SAW) in the past few years. Due to the high degree of miniaturization, compatibility with silicon integrated circuit technology, simplicity and ease of design, this new technology has played an important role in the design of new devices for communications and signal processing. Among the commonly used piezoelectric thin films, ZnO generally yields superior electromechanical properties and is expected to play a leading role in the development of SAW devices.


1998 ◽  
Vol 77 (5) ◽  
pp. 1195-1202
Author(s):  
Andreas Knabchen Yehoshua, B. Levinson, Ora

2014 ◽  
Author(s):  
Jean-Charles Beugnot ◽  
Sylvie Lebrun ◽  
Gilles Pauliat ◽  
Vincent Laude ◽  
Thibaut Sylvestre

2000 ◽  
Vol 284-288 ◽  
pp. 1732-1733
Author(s):  
Irina L Drichko ◽  
Andrey M Diakonov ◽  
Valery V Preobrazenskii ◽  
Ivan Yu Smirnov ◽  
Alexandr I Toropov

Micromachines ◽  
2020 ◽  
Vol 12 (1) ◽  
pp. 10
Author(s):  
Alexander Kukaev ◽  
Dmitry Lukyanov ◽  
Denis Mikhailenko ◽  
Daniil Safronov ◽  
Sergey Shevchenko ◽  
...  

Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.


2021 ◽  
Vol 119 (4) ◽  
pp. 044102
Author(s):  
A. A. Maznev ◽  
R. Mincigrucci ◽  
F. Bencivenga ◽  
V. Unikandanunni ◽  
F. Capotondi ◽  
...  

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