Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation
Keyword(s):
Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.
2013 ◽
Vol 7
(2)
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pp. 211-220
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2021 ◽
Vol 24
(6)
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pp. 51-62
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2019 ◽
Vol 11
(9)
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pp. 168781401987619
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Keyword(s):
2000 ◽
Vol 10
(03)
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pp. 653-684
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2018 ◽
Vol 30
(6)
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pp. 801-812
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