Characterization of RF Sputtered ZnO Piezoelectric Films Using Transmission Electron Microscope

1975 ◽  
Vol 33 ◽  
pp. 86-87
Author(s):  
Kemining W. Yeh ◽  
Richard S. Muller ◽  
Wei-Kuo Wu ◽  
Jack Washburn
Keyword(s):  
Integrated Circuit ◽  
Acoustic Waves ◽  
New Technology ◽  
Surface Acoustic Waves ◽  
Electromechanical Properties ◽  
Leading Role ◽  
Saw Devices ◽  
Transmission Electron ◽  
High Degree

Considerable and continuing interest has been shown in the thin film transducer fabrication for surface acoustic waves (SAW) in the past few years. Due to the high degree of miniaturization, compatibility with silicon integrated circuit technology, simplicity and ease of design, this new technology has played an important role in the design of new devices for communications and signal processing. Among the commonly used piezoelectric thin films, ZnO generally yields superior electromechanical properties and is expected to play a leading role in the development of SAW devices.

scholarly journals Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications

Sensors ◽  
2020 ◽  
Vol 20 (16) ◽  
pp. 4630
Author(s):  
Florian Bartoli ◽  
Jérémy Streque ◽  
Jaafar Ghanbaja ◽  
Philippe Pigeat ◽  
Pascal Boulet ◽  
...  
Keyword(s):  
Acoustic Waves ◽  
Electromechanical Coupling ◽  
Surface Acoustic Waves ◽  
Electromechanical Coupling Coefficient ◽  
X Ray Diffraction ◽  
Plasma Parameters ◽  
Sapphire Substrates ◽  
Saw Devices ◽  
Transmission Electron ◽  
Electrical Characterizations

Scandium aluminum nitride (ScxAl1-xN) films are currently intensively studied for surface acoustic waves (SAW) filters and sensors applications, because of the excellent tradeoff they present between high SAW velocity, large piezoelectric properties and wide bandgap for the intermediate compositions with an Sc content between 10 and 20%. In this paper, the growth of Sc0.09Al0.91N and Sc0.18Al0.82N films on sapphire substrates by sputtering method is investigated. The plasma parameters were optimized, according to the film composition, in order to obtain highly-oriented films. X-ray diffraction rocking-curve measurements show a full width at half maximum below 1.5°. Moreover, high-resolution transmission electron microscopy investigations reveal the epitaxial nature of the growth. Electrical characterizations of the Sc0.09Al0.91N/sapphire-based SAW devices show three identified modes. Numerical investigations demonstrate that the intermediate compositions between 10 and 20% of scandium allow for the achievement of SAW devices with an electromechanical coupling coefficient up to 2%, provided the film is combined with electrodes constituted by a metal with a high density.

scholarly journals Nanostructure-Enhanced Surface Acoustic Waves Biosensor and Its Computational Modeling

2009 ◽  
Vol 2009 ◽  
pp. 1-11 ◽  
Author(s):  
Guigen Zhang
Keyword(s):  
Acoustic Waves ◽  
High Performance ◽  
Surface Acoustic Waves ◽  
Active Surface ◽  
Underlying Mechanism ◽  
Saw Sensor ◽  
Saw Devices ◽  
Operational Capabilities ◽  
Sensing Platform ◽  
Enhanced Surface

Surface acoustic wave (SAW) devices are considered to be very promising in providing a high-performance sensing platform with wireless and remote operational capabilities. In this review, the basic principles of SAW devices and Love-mode SAW-based biosensors are discussed first to illustrate the need for surface enhancement for the active area of a SAW sensor. Then some of the recent efforts made to incorporate nanostructures into SAW sensors are summarized. After that, a computational approach to elucidate the underlying mechanism for the operations of a Love-mode SAW biosensor with nanostructured active surface is discussed. Finally, a modeling example for a Love-mode SAW sensor with skyscraper nanopillars added to in its active surface along with some selected results is presented.

Fabrication and characterization of highly textured (Bi,Pb)2Sr2Ca2Cu3Ox superconducting ceramics using high magnetic field and cold isostatic pressing

1995 ◽  
Vol 10 (10) ◽  
pp. 2433-2443 ◽  
Author(s):  
Wai Lo ◽  
R. Stevens ◽  
R. Doyle ◽  
A.M. Campbell ◽  
W.Y. Liang
Keyword(s):  
Magnetic Field ◽  
Electron Microscopy ◽  
Cold Isostatic Pressing ◽  
Sintered Ceramic ◽  
Grain Alignment ◽  
Isostatic Pressing ◽  
Transmission Electron ◽  
Superconducting Ceramics ◽  
High Degree

High textured (Bi,Pb)2Sr2Ca2Cu3Ox ceramics have been fabricated by aligning deflocculated flakes of (Bi,Pb)2Sr2Ca2Cu3Ox suspended in an organic medium by means of a high de magnetic field (6 T) at room temperature followed by cold isostatic pressing. The proportion of the (Bi,Pb)2Sr2Ca2Cu3Ox phase in the precursor powder was carefully controlled, and the characteristics of the powder, such as size distribution and morphology, were determined. A high degree of grain alignment was found in the specimens after the magnetic alignment, although the bulk density of the materials was low. Cold isostatic pressing substantially increased the density of the magnetically prealigned specimens which also resulted in a slight decrease in the degree of grain alignment. This minor realignment was found to be due to the various kinds of processing defects that appeared in the specimens during compaction due to the grinding and cracking of the grains and their interlocking. The microstructural and superconducting properties of the sintered ceramic have been studied using texture goniometry, high resolution scanning electron microscopy, transmission electron microscopy, ac magnetic susceptometry, and critical current measurements.

scholarly journals Highly Sensitive Surface Acoustic Wave Magnetic Field Sensor Using Multilayered TbCo2/FeCo Thin Film

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 902 ◽  
Author(s):  
Aurelien Mazzamurro ◽  
Abdelkrim Talbi ◽  
Yannick Dusch ◽  
Omar Elmazria ◽  
Philippe Pernod ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Thin Film ◽  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Magnetic Field Sensor ◽  
Nanostructured Thin Film ◽  
Highly Sensitive ◽  
Magnetic Model ◽  
Field Sensor

Over the last decades, the use of Surface Acoustic Waves (SAW) has emerged as a promising technology in many applications such as filters, signal processing but also sensors. We report the fabrication and the characterization of a SAW delay line magnetic field sensor using uniaxial multi-layered 14×[TbCo2(3.7nm)/FeCo(4nm)] nanostructured thin film deposited on Y36° Lithium Niobate (Figure 1a). The sensor shows an interesting dependency to a tunable bias magnetic field with different orientations relative to the easy axis. The obtained results are well explained using an equivalent piezo-magnetic model described in a previous work.

Microstructural and Compositional Characterization of SiC-On-Insulator Structures

1999 ◽  
Vol 5 (S2) ◽  
pp. 770-771
Author(s):  
Manabu Ishimaru ◽  
Robert M. Dickerson ◽  
Kurt E. Sickafus
Keyword(s):  
Ion Implantation ◽  
Integrated Circuit ◽  
High Speed ◽  
Scanning Transmission Electron Microscope ◽  
Oxygen Ions ◽  
Oxygen Ion ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Oxygen Ion Implantation

As the size of Si integrated circuit structures is continually reduced, interest in semiconductor-oninsulator (SOI) structures has heightened. SOI structures have already been developed for Si using oxygen ion implantation. However, the application of Si devices is limited due to the physical properties of Si. As an alternative to Si, SiC is a potentially important semiconductor for high-power, high-speed, and high-temperature electronic devices. Therefore, this material is a candidate for expanding the capabilities of Si-based technology. In this study, we performed oxygen ion implantation into bulk SiC to produce SiC-on-insulator structures. We examined the microstructures and compositional distributions in implanted specimens using transmission electron microscopy and a scanning transmission electron microscope equipped with an energy-dispersive X-ray spectrometer (STEM-EDX).Figures 1(a) and 2(a) show bright-field images of 6H-SiC implanted with 180 keV oxygen ions at 650 °C to fluences of 7xl017 and 1.4xl018 cm−2, respectively. Three regions with distinct image contrast are apparent in Figs. 1(a) and 2(a), as indicated by A, B, and C.

scholarly journals Structural characterization of Yba2Cu3O7–δ/Y2O3 composite films

1998 ◽  
Vol 13 (4) ◽  
pp. 954-958 ◽  
Author(s):  
P. R. Broussard ◽  
M. A. Wall ◽  
J. Talvacchio
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Coincidence Site Lattice ◽  
Composite Films ◽  
X Ray Diffraction ◽  
Plane Orientation ◽  
Transmission Electron ◽  
Two Phases ◽  
High Degree

Using 4-circle x-ray diffraction and transmission electron microscopy, we have studied the microstructure and in-plane orientation of the phases present in thin film composite mixtures of Yba2Cu3O7–δ and Y2O3. We see a high degree of in-plane orientation and have verified a previous prediction for the in-plane order of Y2BaCuO5 on (110) MgO. Transmission electron microscopy shows the composite films to be a mixture of two phases, with YBCO grain sizes of ≈1 μm. We have also compared our observations of the in-plane order to the predictions of a modified near coincidence site lattice model.

scholarly journals Nondestructive Evaluation of Thermal Aging in Al6061 Alloy by Measuring Acoustic Nonlinearity of Laser-Generated Surface Acoustic Waves

Metals ◽  
2019 ◽  
Vol 10 (1) ◽  
pp. 38 ◽  
Author(s):  
Jihyun Jun ◽  
Hogeon Seo ◽  
Kyung-Young Jhang
Keyword(s):  
Mechanical Properties ◽  
Nondestructive Evaluation ◽  
Thermal Aging ◽  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Tensile Tests ◽  
Acoustic Nonlinearity ◽  
Transmission Electron ◽  
Heat Treated ◽  
Elongation To Failure

The structures in high-temperature environments are prone to undergo hardening and embrittlement as a result of thermal aging; this can cause variations in their mechanical properties. Because these changes occur at the microstructural level, it is difficult to evaluate them through linear ultrasonic techniques. In this work, a surface acoustic wave (SAW) was used to measure and compare the acoustic nonlinearity and mechanical properties of Al6061 alloys heat-treated at 220 °C for different durations (0 min, 20 min, 40 min, 1 h, 2 h, 10 h, 100 h, 1000 h). The SAW was generated by a pulsed laser and then received by an interferometer. Moreover, the yield strength, ultimate strength, and elongation to failure were measured by tensile tests. The results demonstrate that the critical variations in the mechanical properties can be detected by monitoring the variation features in the acoustic nonlinearity. Transmission electron microscopy images were captured to observe the microstructural changes, which shows that the acoustic nonlinearity varied according to the change in the precipitation phase. This supports the acoustic nonlinearity measurement using the laser-generated SAW being an effective technique for the fully noncontact nondestructive evaluation of material degradations as well as changes in mechanical properties.

Two-Axis Solid-State Microgyroscope on Surface Acoustic Waves

2019 ◽  
Vol 20 (5) ◽  
pp. 299-307
Author(s):  
V. P. Sizov ◽  
V. N. Pogorelov ◽  
Yu. V. Vakhtin
Keyword(s):  
Solid State ◽  
Elastic Waves ◽  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Oscillation Amplitude ◽  
Substrate Layer ◽  
Production Technologies ◽  
Wave Models ◽  
And Control ◽  
High Degree

This article focuses on the development of a two-axis solid state micro gyroscope (SMG) on surface acoustic waves (SAW). The described gyroscope belongs to the category of inexpensive sensing elements featuring a high degree of longtime overload stability. This advantage seems to make SAW SMGs a priority choice for navigation and control systems functioning in severe overload environments of up to 65,000 g. As of today SAW SMGs are designed according to a number of known principles. Such SMGs may also operate on standing SAWs or traveling SAWs. This article addresses the first gyro type. Unfortunately, the existing standing SAW SMGs share a common limitation of measuring angular rates in relation to one axis only. This research attempts to introduce an innovative two-axis standing SAW SMG. The influence of the basis rotation on the parameters of the elastic waves traveling within the substrate layer was carefully studied. Incident and reflected wave models were also elaborated. The numerical simulation results demonstrate the effects of the basis rotation on the complex factors of the volume waves reflected by the substrate layer and on the phase velocity and frequency thereof as well as on the oscillation amplitude of the particles involved in SAW transition, and on the elliptical particle movement path configuration. Also, the SAW SMG is compared to the existing micromechanical gyroscopes, and the basic SAW SMG production technologies are reviewed.

Sign in / Sign up

Export Citation Format

Share Document