Micro-three dimensional shape measurement method based on shadow Moiré using scanning electron microscopy

2006 ◽  
Vol 53 (18) ◽  
pp. 2641-2655 ◽  
Author(s):  
Y. Arai ◽  
S. Yokozeki
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Measurement Method ◽  
Three Dimensional ◽  
Shape Measurement ◽  
Shadow Moire ◽  
Shadow Moiré ◽  
Dimensional Shape ◽  
Three Dimensional Shape ◽  
Scanning Electron

Simulation and Verification of Three-Dimensional Shape Measurement Method for Composite Surface

2020 ◽  
Vol 57 (19) ◽  
pp. 191202
Author(s):  
郭志南 Guo Zhinan ◽  
刘小红 Liu Xiaohong ◽  
张宗华 Zhang Zonghua
Keyword(s):  
Measurement Method ◽  
Three Dimensional ◽  
Shape Measurement ◽  
Composite Surface ◽  
Dimensional Shape ◽  
Three Dimensional Shape

A fast three-dimensional shape measurement method based on color phase coding

Optik ◽  
2016 ◽  
Vol 127 (3) ◽  
pp. 1011-1015 ◽  
Author(s):  
Biao Li ◽  
Yanjun Fu ◽  
Jiancheng Zhang ◽  
Haitao Wu ◽  
Guisuo Xia ◽  
...  
Keyword(s):  
Measurement Method ◽  
Three Dimensional ◽  
Shape Measurement ◽  
Phase Coding ◽  
Dimensional Shape ◽  
Three Dimensional Shape
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