Seed layer effect on the (0 0 2) texture and piezoelectric properties of pulsed-DC sputtered AlN thin films

2016 ◽  
Vol 2 (1) ◽  
pp. 66-72
Author(s):  
M. Hasheminiasari ◽  
J. Lin
2015 ◽  
Vol 35 (7) ◽  
pp. 2041-2049 ◽  
Author(s):  
W.L. Li ◽  
T.D. Zhang ◽  
D. Xu ◽  
Y.F. Hou ◽  
W.P. Cao ◽  
...  

2009 ◽  
Vol 105 (7) ◽  
pp. 07A743 ◽  
Author(s):  
L. N. Zhang ◽  
J. F. Hu ◽  
J. S. Chen ◽  
J. Ding

2010 ◽  
Vol 5 ◽  
pp. 886-889 ◽  
Author(s):  
A.T. Tran ◽  
H. Schellevis ◽  
H.T.M. Pham ◽  
C. Shen ◽  
P.M. Sarro

RSC Advances ◽  
2014 ◽  
Vol 4 (100) ◽  
pp. 56933-56937 ◽  
Author(s):  
W. L. Li ◽  
T. D. Zhang ◽  
Y. F. Hou ◽  
Y. Zhao ◽  
D. Xu ◽  
...  

Ba(Zr0.2Ti0.8)O3–0.5(Ba0.7Ca0.3)TiO3 (BZT–0.5BCT) thin films were prepared from two ceramics targets, Ba(Zr0.2Ti0.8)O3 and (Ba0.7Ca0.3)TiO3, using dual-magnetron sputtering, and a LaNiO3 (LNO) seed layer was introduced between the film and Pt(111)/Ti/SiO2/Si substrates via a sol–gel technique.


Vacuum ◽  
2021 ◽  
Vol 188 ◽  
pp. 110200
Author(s):  
Sihui Wang ◽  
Wei Wei ◽  
Yonghao Gao ◽  
Haibin Pan ◽  
Yong Wang

2009 ◽  
Vol 94 (22) ◽  
pp. 222110 ◽  
Author(s):  
S. S. N. Bharadwaja ◽  
C. Venkatasubramanian ◽  
N. Fieldhouse ◽  
S. Ashok ◽  
M. W. Horn ◽  
...  

Author(s):  
Jong-Un Woo ◽  
Sun-Woo Kim ◽  
Dae-Su Kim ◽  
In-Su Kim ◽  
Ho-Sung Shin ◽  
...  

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