Ba(Zr0.2Ti0.8)O3–0.5(Ba0.7Ca0.3)TiO3 (BZT–0.5BCT) thin films were prepared from two ceramics targets, Ba(Zr0.2Ti0.8)O3 and (Ba0.7Ca0.3)TiO3, using dual-magnetron sputtering, and a LaNiO3 (LNO) seed layer was introduced between the film and Pt(111)/Ti/SiO2/Si substrates via a sol–gel technique.