Electron energy distribution functions and power transfer data for radio-frequency discharges in CO2laser gas mixtures
1990 ◽
Vol 23
(12)
◽
pp. 1624-1632
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1999 ◽
Vol 119
(6)
◽
pp. 866-871
◽
1992 ◽
1988 ◽
Vol 21
(5)
◽
pp. 691-699
◽
1993 ◽
pp. 303-312
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