Observations of Electron Energy Distribution Functions and Ion Bombardment Secondary Electrons in a Capacitively Coupled Radio Frequency Plasma

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms1990.119.6_866 ◽

1999 ◽

Vol 119 (6) ◽

pp. 866-871 ◽

Author(s):

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Distribution Functions ◽

Radio Frequency Plasma ◽

Electron Energy Distribution ◽

Secondary Electrons ◽

Capacitively Coupled ◽

Frequency Plasma ◽

Energy Distribution Functions

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Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering

Applied Physics Letters ◽

10.1063/1.1363695 ◽

2001 ◽

Vol 78 (21) ◽

pp. 3187-3189 ◽

Author(s):

M. A. Mansour ElSabbagh ◽

M.D. Bowden ◽

K. Uchino ◽

K. Muraoka

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Thomson Scattering ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Energy Distribution Functions

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Structure observed in measured electron energy distribution functions in capacitively coupled radio frequency hydrogen plasmas

Applied Physics Letters ◽

10.1063/1.124366 ◽

1999 ◽

Vol 75 (3) ◽

pp. 331-333 ◽

Author(s):

C. M. O. Mahony ◽

J. McFarland ◽

P. G. Steen ◽

W. G. Graham

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Hydrogen Plasmas ◽

Energy Distribution Functions

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Tailoring electron energy distribution functions through energy confinement in dual radio-frequency driven atmospheric pressure plasmas

Applied Physics Letters ◽

10.1063/1.4758463 ◽

2012 ◽

Vol 101 (15) ◽

pp. 154107 ◽

Author(s):

C. O'Neill ◽

J. Waskoenig ◽

T. Gans

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Atmospheric Pressure ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Energy Confinement ◽

Atmospheric Pressure Plasmas ◽

Energy Distribution Functions

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Investigation of effect of excitation frequency on electron energy distribution functions in low pressure radio frequency bounded plasmas

Physics of Plasmas ◽

10.1063/1.3605021 ◽

2011 ◽

Vol 18 (7) ◽

pp. 072102 ◽

Author(s):

Sudeep Bhattacharjee ◽

Trevor Lafleur ◽

Christine Charles ◽

Rod Boswell

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Excitation Frequency ◽

Low Pressure ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Energy Distribution Functions

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Electron Energy Distribution Functions of Surface Wave Produced Radio Frequency and Microwave Plasmas

10.1063/1.41639 ◽

1992 ◽

Author(s):

U. Kortshagen ◽

H. Schlüter

Keyword(s):

Surface Wave ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Microwave Plasmas ◽

Energy Distribution Functions

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Electron energy distribution functions and power transfer data for radio-frequency discharges in CO2laser gas mixtures

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/23/12/020 ◽

1990 ◽

Vol 23 (12) ◽

pp. 1624-1632 ◽

Author(s):

T Ledig ◽

B Schroder

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Gas Mixtures ◽

Distribution Functions ◽

Power Transfer ◽

Electron Energy Distribution ◽

Transfer Data ◽

Radio Frequency Discharges ◽

Energy Distribution Functions

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Combined effects of gas pressure and exciting frequency on electron energy distribution functions in hydrogen capacitively coupled plasmas

Physics of Plasmas ◽

10.1063/1.4789611 ◽

2013 ◽

Vol 20 (2) ◽

pp. 023501 ◽

Author(s):

E. Abdel-Fattah ◽

H. Sugai

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Gas Pressure ◽

Combined Effects ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Exciting Frequency ◽

Coupled Plasmas ◽

Energy Distribution Functions

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Measured and simulated electron energy distribution functions in a low‐pressure radio frequency discharge in argon

Applied Physics Letters ◽

10.1063/1.109088 ◽

1993 ◽

Vol 62 (25) ◽

pp. 3247-3249 ◽

Author(s):

M. M. Turner ◽

R. A. Doyle ◽

M. B. Hopkins

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Low Pressure ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Energy Distribution Functions ◽

Radio Frequency Discharge

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Emissive probe measurements of electron energy distribution function in radio-frequency plasma

IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science ◽

10.1109/plasma.2005.359477 ◽

2005 ◽

Author(s):

H. Shindo ◽

T. Ozawa ◽

T. Fukasawa

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Radio Frequency Plasma ◽

Electron Energy Distribution ◽

Frequency Plasma ◽

Probe Measurements

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Electron energy distribution functions in radio-frequency collision dominated nitrogen discharges

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/21/5/005 ◽

1988 ◽

Vol 21 (5) ◽

pp. 691-699 ◽

Author(s):

M Capitelli ◽

R Celiberto ◽

C Gorse ◽

R Winkler ◽

J Wilhelm

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Energy Distribution Functions

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