Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering
1999 ◽
Vol 119
(6)
◽
pp. 866-871
◽
1992 ◽
1990 ◽
Vol 23
(12)
◽
pp. 1624-1632
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