Electron Energy Distribution Functions of Surface Wave Produced Radio Frequency and Microwave Plasmas
1993 ◽
pp. 303-312
◽
1999 ◽
Vol 119
(6)
◽
pp. 866-871
◽
1991 ◽
Vol 24
(9)
◽
pp. 1585-1593
◽
1988 ◽
Vol 21
(3)
◽
pp. 411-417
◽
1990 ◽
Vol 23
(12)
◽
pp. 1624-1632
◽
1991 ◽
Vol 24
(9)
◽
pp. 1571-1584
◽