Measured and simulated electron energy distribution functions in a low‐pressure radio frequency discharge in argon

1993 ◽  
Vol 62 (25) ◽  
pp. 3247-3249 ◽  
Author(s):  
M. M. Turner ◽  
R. A. Doyle ◽  
M. B. Hopkins
Keyword(s):  
Energy Distribution ◽  
Radio Frequency ◽  
Electron Energy ◽  
Low Pressure ◽  
Distribution Functions ◽  
Electron Energy Distribution ◽  
Energy Distribution Functions ◽  
Radio Frequency Discharge

Study of Electron Energy Distribution Functions (EEDFs) in Three DC Low-Pressure Plasma Sources

1998 ◽  
Vol 37 (Part 1, No. 12B) ◽  
pp. 6906-6915
Author(s):  
Tatjana Antonova ◽  
Gleb Bougrov ◽  
Antonina Bougrova ◽  
Won-Kook Choi ◽  
Leonid Goncharov ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Electron Energy ◽  
Low Pressure ◽  
Distribution Functions ◽  
Electron Energy Distribution ◽  
Plasma Sources ◽  
Pressure Plasma ◽  
Low Pressure Plasma ◽  
Energy Distribution Functions
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