Investigation of effect of excitation frequency on electron energy distribution functions in low pressure radio frequency bounded plasmas
1999 ◽
Vol 119
(6)
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pp. 866-871
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2004 ◽
Vol 13
(4)
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pp. 646-653
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1998 ◽
Vol 37
(Part 1, No. 12B)
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pp. 6906-6915
1997 ◽
Vol 36
(Part 2, No. 7A)
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pp. L877-L879
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1986 ◽
Vol 19
(7)
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pp. 1197-1211
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