Experimental diagnosis of electron density and temperature in capacitively coupled argon plasmas: Triple-frequency discharges and two-dimensional spatial distributions
2010 ◽
Vol 43
(50)
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pp. 505203
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2011 ◽
Vol 39
(11)
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pp. 2486-2487
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2011 ◽
Vol 53
(8)
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pp. 085006
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2002 ◽
Vol 11
(4)
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pp. 466-475
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1994 ◽
Vol 12
(6)
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pp. 3115-3119
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2007 ◽
Vol 40
(22)
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pp. 7019-7023
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