On the electrical asymmetry effect in large area multiple frequency capacitively coupled plasmas
2014 ◽
Vol 47
(6)
◽
pp. 065201
◽
Keyword(s):
Keyword(s):
Keyword(s):
2013 ◽
Vol 46
(8)
◽
pp. 084010
◽
2014 ◽
Vol 24
(1)
◽
pp. 015021
◽
2015 ◽
Vol 25
(1)
◽
pp. 013001
◽
Keyword(s):