Simulations of electromagnetic effects in large-area high-frequency capacitively coupled plasmas with symmetric electrodes: Different axial plasma density profiles

Jian-Kai Liu; Yu-Ru Zhang; Kai Zhao; De-Qi Wen; You-Nian Wang

doi:10.1063/1.5129492

Simulations of electromagnetic effects in large-area high-frequency capacitively coupled plasmas with symmetric electrodes: Different axial plasma density profiles

Physics of Plasmas ◽

10.1063/1.5129492 ◽

2020 ◽

Vol 27 (2) ◽

pp. 023502

Author(s):

Jian-Kai Liu ◽

Yu-Ru Zhang ◽

Kai Zhao ◽

De-Qi Wen ◽

You-Nian Wang

Keyword(s):

Plasma Density ◽

High Frequency ◽

Large Area ◽

Density Profiles ◽

Capacitively Coupled ◽

Electromagnetic Effects ◽

Coupled Plasmas

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Observation of the standing wave effect in large-area, very-high-frequency capacitively coupled plasmas by using a fiber Bragg grating sensor

Journal of Applied Physics ◽

10.1063/1.5024835 ◽

2018 ◽

Vol 123 (22) ◽

pp. 223304 ◽

Cited By ~ 1

Author(s):

Dao-Man Han ◽

Yong-Xin Liu ◽

Fei Gao ◽

Xiang-Yu Wang ◽

Ang Li ◽

...

Keyword(s):

Fiber Bragg Grating ◽

Standing Wave ◽

High Frequency ◽

Large Area ◽

Very High Frequency ◽

Wave Effect ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

Bragg Grating Sensor ◽

Very High

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Relationship between center-peaked plasma density profiles and harmonic electromagnetic waves in very high frequency capacitively coupled plasma reactors

Japanese Journal of Applied Physics ◽

10.7567/jjap.53.03db01 ◽

2014 ◽

Vol 53 (3S2) ◽

pp. 03DB01 ◽

Cited By ~ 10

Author(s):

Ikuo Sawada ◽

Peter L. G. Ventzek ◽

Barton Lane ◽

Tatsuro Ohshita ◽

Rochan R. Upadhyay ◽

...

Keyword(s):

Plasma Density ◽

High Frequency ◽

Electromagnetic Waves ◽

Plasma Reactors ◽

Very High Frequency ◽

Density Profiles ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma ◽

Very High

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Influence of dielectric materials on uniformity of large-area capacitively coupled plasmas for N 2 /Ar discharges

Chinese Physics B ◽

10.1088/1674-1056/25/10/105206 ◽

2016 ◽

Vol 25 (10) ◽

pp. 105206

Author(s):

Ying-Shuang Liang ◽

Yu-Ru Zhang ◽

You-Nian Wang

Keyword(s):

Dielectric Materials ◽

Large Area ◽

Capacitively Coupled ◽

Coupled Plasmas

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Influence of inhomogeneous magnetic field on the characteristics of very high frequency capacitively coupled plasmas

Journal of Applied Physics ◽

10.1063/1.3296349 ◽

2010 ◽

Vol 107 (5) ◽

pp. 053302 ◽

Cited By ~ 8

Author(s):

Kallol Bera ◽

Shahid Rauf ◽

Jason Kenney ◽

Leonid Dorf ◽

Ken Collins

Keyword(s):

Magnetic Field ◽

High Frequency ◽

Inhomogeneous Magnetic Field ◽

Very High Frequency ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

Very High

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Simulations of electromagnetic effects in high-frequency capacitively coupled discharges using the Darwin approximation

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/46/8/084017 ◽

2013 ◽

Vol 46 (8) ◽

pp. 084017 ◽

Cited By ~ 25

Author(s):

Denis Eremin ◽

Torben Hemke ◽

Ralf Peter Brinkmann ◽

Thomas Mussenbrock

Keyword(s):

High Frequency ◽

Capacitively Coupled ◽

Electromagnetic Effects ◽

Darwin Approximation

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Modification of Semianalytical Finite Element Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas: II. Effects of Nonuniform Bulk Plasma Density and Charging at Dielectric Surface

Japanese Journal of Applied Physics ◽

10.7567/jjap.50.036001 ◽

2011 ◽

Vol 50 (3R) ◽

pp. 036001 ◽

Cited By ~ 2

Author(s):

Kazuki Denpoh ◽

Tatsuru Shirafuji

Keyword(s):

Finite Element ◽

Finite Element Model ◽

Radio Frequency ◽

Plasma Density ◽

Element Model ◽

Dielectric Surface ◽

Dual Frequency ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

Bulk Plasma

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Capacitively Coupled Plasmas: Electromagnetic Effects

Encyclopedia of Plasma Technology ◽

10.1081/e-eplt-120052495 ◽

2016 ◽

pp. 212-227

Keyword(s):

Capacitively Coupled ◽

Electromagnetic Effects ◽

Coupled Plasmas

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Modification of Semianalytical Finite Element Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas: II. Effects of Nonuniform Bulk Plasma Density and Charging at Dielectric Surface

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.036001 ◽

2011 ◽

Vol 50 ◽

pp. 036001 ◽

Cited By ~ 1

Author(s):

Kazuki Denpoh ◽

Tatsuru Shirafuji

Keyword(s):

Finite Element ◽

Finite Element Model ◽

Radio Frequency ◽

Plasma Density ◽

Element Model ◽

Dielectric Surface ◽

Dual Frequency ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

Bulk Plasma

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Fluid simulation of the electromagnetic effects and the phase shift effect in Ar/CF4 capacitively coupled plasmas

2012 Abstracts IEEE International Conference on Plasma Science ◽

10.1109/plasma.2012.6383808 ◽

2012 ◽

Author(s):

Yu-Ru Zhang ◽

You-Nian Wang ◽

A. Bogaerts

Keyword(s):

Phase Shift ◽

Fluid Simulation ◽

Capacitively Coupled ◽

Electromagnetic Effects ◽

Shift Effect ◽

Coupled Plasmas

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Role of high-frequency power in C4F8dual-frequency capacitively coupled plasmas treating high-kHfO2films

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/46/43/435102 ◽

2013 ◽

Vol 46 (43) ◽

pp. 435102

Author(s):

H Y Zhang ◽

X M Yang ◽

T Yu ◽

C G Jin ◽

C Ye ◽

...

Keyword(s):

High Frequency ◽

High Frequency Power ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

Frequency Power

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