Effects of magnetic field on the secondary electron asymmetry effect in capacitively coupled plasmas

Physics of Plasmas ◽

10.1063/5.0068101 ◽

2021 ◽

Vol 28 (12) ◽

pp. 123505

Author(s):

Shali Yang ◽

Tianxiang Zhang ◽

Hanlei Lin ◽

Hao Wu ◽

Qiang Zhang

Keyword(s):

Magnetic Field ◽

Secondary Electron ◽

Asymmetry Effect ◽

Capacitively Coupled ◽

Coupled Plasmas

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The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas

Applied Physics Letters ◽

10.1063/1.4817920 ◽

2013 ◽

Vol 103 (6) ◽

pp. 064102 ◽

Author(s):

Ihor Korolov ◽

Aranka Derzsi ◽

Zoltán Donkó ◽

Julian Schulze

Keyword(s):

Secondary Electron ◽

Asymmetry Effect ◽

Capacitively Coupled ◽

Coupled Plasmas

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Magnetical asymmetry effect in capacitively coupled plasmas: effects of the magnetic field gradient, pressure, and gap length

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aab47e ◽

2018 ◽

Vol 27 (3) ◽

pp. 035008 ◽

Author(s):

Shali Yang ◽

Lijie Chang ◽

Ya Zhang ◽

Wei Jiang

Keyword(s):

Magnetic Field ◽

Field Gradient ◽

Magnetic Field Gradient ◽

Asymmetry Effect ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

The Magnetic Field

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The influence of the secondary electron induced asymmetry on the Electrical Asymmetry Effect in capacitively coupled plasmas

2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS) ◽

10.1109/plasma.2014.7012420 ◽

2014 ◽

Author(s):

J. Schulze ◽

E. Schuengel ◽

I. Korolov ◽

A. Derzsi ◽

Z. Donko

Keyword(s):

Secondary Electron ◽

Asymmetry Effect ◽

Capacitively Coupled ◽

Coupled Plasmas

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Influence of inhomogeneous magnetic field on the characteristics of very high frequency capacitively coupled plasmas

Journal of Applied Physics ◽

10.1063/1.3296349 ◽

2010 ◽

Vol 107 (5) ◽

pp. 053302 ◽

Author(s):

Kallol Bera ◽

Shahid Rauf ◽

Jason Kenney ◽

Leonid Dorf ◽

Ken Collins

Keyword(s):

Magnetic Field ◽

High Frequency ◽

Inhomogeneous Magnetic Field ◽

Very High Frequency ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

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The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aa7c88 ◽

2017 ◽

Vol 26 (8) ◽

pp. 085006 ◽

Author(s):

M Daksha ◽

A Derzsi ◽

S Wilczek ◽

J Trieschmann ◽

T Mussenbrock ◽

...

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Heavy Particle ◽

Secondary Electron Emission ◽

Dual Frequency ◽

Power Absorption ◽

Capacitively Coupled ◽

Coupled Plasmas

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Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/24/3/034002 ◽

2015 ◽

Vol 24 (3) ◽

pp. 034002 ◽

Author(s):

A Derzsi ◽

I Korolov ◽

E Schüngel ◽

Z Donkó ◽

J Schulze

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

Energy Dependent

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Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/24/1/015021 ◽

2014 ◽

Vol 24 (1) ◽

pp. 015021 ◽

Author(s):

B Bruneau ◽

T Novikova ◽

T Lafleur ◽

J P Booth ◽

E V Johnson

Keyword(s):

Asymmetry Effect ◽

Capacitively Coupled ◽

Coupled Plasmas

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Electrical asymmetry effect in inhomogeneously magnetized capacitively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abad55 ◽

2020 ◽

Vol 29 (11) ◽

pp. 114002

Author(s):

Jing-Yu Sun ◽

Quan-Zhi Zhang ◽

Jia-Rui Liu ◽

Yuan-Hong Song ◽

You-Nian Wang

Keyword(s):

Asymmetry Effect ◽

Capacitively Coupled ◽

Coupled Plasmas

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Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect

Plasma Sources Science and Technology ◽

10.1088/0963-0252/25/1/013001 ◽

2015 ◽

Vol 25 (1) ◽

pp. 013001 ◽

Author(s):

T Lafleur

Keyword(s):

Asymmetry Effect ◽

Capacitively Coupled ◽

Coupled Plasmas

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Secondary electron induced asymmetry in capacitively coupled plasmas

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/46/13/135201 ◽

2013 ◽

Vol 46 (13) ◽

pp. 135201 ◽

Author(s):

T Lafleur ◽

P Chabert ◽

J P Booth

Keyword(s):

Secondary Electron ◽

Capacitively Coupled ◽

Coupled Plasmas

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