The effect of annealing on structural and optical properties of ZnO thin films grown by pulsed filtered cathodic vacuum arc deposition

2006 ◽  
Vol 18 (27) ◽  
pp. 6391-6400 ◽  
Author(s):  
Ebru Şenadim ◽  
Hamide Kavak ◽  
Ramazan Esen
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Structural And Optical Properties ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Arc Deposition

Hemocompatibility of ZnO thin films prepared by filtered cathodic vacuum arc deposition

Vacuum ◽  
2013 ◽  
Vol 89 ◽  
pp. 220-224 ◽  
Author(s):  
Zhanyun Huang ◽  
Ping Luo ◽  
Wanzong Chen ◽  
Shirong Pan ◽  
Dihu Chen
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Arc Deposition

Optical and photoconductivity properties of ZnO thin films grown by pulsed filtered cathodic vacuum arc deposition

Vacuum ◽  
2008 ◽  
Vol 83 (3) ◽  
pp. 540-543 ◽  
Author(s):  
H. Kavak ◽  
E. Senadım Tuzemen ◽  
L.N. Ozbayraktar ◽  
R. Esen
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Arc Deposition

Influence of Bias Voltage on the Structural Properties and Adhesive Performance of ZnO Thin Films Deposited by Cathodic Vacuum Arc Deposition on Polyimide Foil Substrates

2010 ◽  
Vol 160-162 ◽  
pp. 194-199 ◽  
Author(s):  
Chang Ji Hu ◽  
Zhen Hui He
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Interfacial Shear Strength ◽  
Interfacial Shear ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Zno Thin Film ◽  
Vacuum Arc Deposition ◽  
Polyimide Foil ◽  
Arc Deposition

ZnO thin films were deposited on polyimide foil substrates using cathodic vacuum arc deposition technique. X-ray diffraction was used to investigate the influence of bias voltage on the structure of ZnO thin films. The results show that all the samples have (002) preferred orientation. The internal stress of the films is compressive stress which increases with the bias voltage. Fragmentation test shows that the intrinsic interfacial shear strength of ZnO thin film without bias voltage is slightly lower than the shear yield strength of polyimide substrate; the intrinsic interfacial shear strength of ZnO thin film increases with the bias voltage from -50V to -200V, which indicates that bias voltage is beneficial to the enhancement of the adhesion between ZnO films and polyimide substrates. Further increase of the bias voltage to -300V leads to surface damage of the polyimide substrates.

Determination of Thickness and Optical Constants of ZnO Thin Films Prepared by Filtered Cathode Vacuum Arc Deposition

2008 ◽  
Vol 25 (2) ◽  
pp. 743-746 ◽  
Author(s):  
Wang Ming-Dong ◽  
Zhu Dao-Yun ◽  
Liu Yi ◽  
Zhang Lin ◽  
Zheng Chang-Xi ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Constants ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Arc Deposition
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