Influence of deposition pressure on the adhesion of ZnO thin films deposited by cathodic vacuum arc deposition on polyimide foil substrates

ZnO thin films were deposited on polyimide foil substrates using cathodic vacuum arc deposition technique. X-ray diffraction was used to investigate the influence of bias voltage on the structure of ZnO thin films. The results show that all the samples have (002) preferred orientation. The internal stress of the films is compressive stress which increases with the bias voltage. Fragmentation test shows that the intrinsic interfacial shear strength of ZnO thin film without bias voltage is slightly lower than the shear yield strength of polyimide substrate; the intrinsic interfacial shear strength of ZnO thin film increases with the bias voltage from -50V to -200V, which indicates that bias voltage is beneficial to the enhancement of the adhesion between ZnO films and polyimide substrates. Further increase of the bias voltage to -300V leads to surface damage of the polyimide substrates.

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Hemocompatibility of ZnO thin films prepared by filtered cathodic vacuum arc deposition

Vacuum ◽

10.1016/j.vacuum.2012.05.018 ◽

2013 ◽

Vol 89 ◽

pp. 220-224 ◽

Cited By ~ 6

Author(s):

Zhanyun Huang ◽

Ping Luo ◽

Wanzong Chen ◽

Shirong Pan ◽

Dihu Chen

Keyword(s):

Thin Films ◽

Zno Thin Films ◽

Vacuum Arc ◽

Vacuum Arc Deposition ◽

Filtered Cathodic Vacuum Arc ◽

Arc Deposition

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The effect of annealing on structural and optical properties of ZnO thin films grown by pulsed filtered cathodic vacuum arc deposition

Journal of Physics Condensed Matter ◽

10.1088/0953-8984/18/27/021 ◽

2006 ◽

Vol 18 (27) ◽

pp. 6391-6400 ◽

Cited By ~ 33

Author(s):

Ebru Şenadim ◽

Hamide Kavak ◽

Ramazan Esen

Keyword(s):

Thin Films ◽

Optical Properties ◽

Zno Thin Films ◽

Vacuum Arc ◽

Structural And Optical Properties ◽

Vacuum Arc Deposition ◽

Filtered Cathodic Vacuum Arc ◽

Arc Deposition

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Determination of Thickness and Optical Constants of ZnO Thin Films Prepared by Filtered Cathode Vacuum Arc Deposition

Chinese Physics Letters ◽

10.1088/0256-307x/25/2/106 ◽

2008 ◽

Vol 25 (2) ◽

pp. 743-746 ◽

Cited By ~ 15

Author(s):

Wang Ming-Dong ◽

Zhu Dao-Yun ◽

Liu Yi ◽

Zhang Lin ◽

Zheng Chang-Xi ◽

...

Keyword(s):

Thin Films ◽

Optical Constants ◽

Zno Thin Films ◽

Vacuum Arc ◽

Vacuum Arc Deposition ◽

Arc Deposition

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Comparison of N-doped ZnO and N–Al codoped ZnO thin films deposited by pulsed filtered cathodic vacuum arc deposition

Indian Journal of Physics ◽

10.1007/s12648-014-0569-4 ◽

2014 ◽

Vol 89 (4) ◽

pp. 337-345 ◽

Cited By ~ 1

Author(s):

Ebru Senadim Tuzemen ◽

K. Kara ◽

D. K. Takci ◽

R. Esen

Keyword(s):

Thin Films ◽

Zno Thin Films ◽

Vacuum Arc ◽

Vacuum Arc Deposition ◽

Doped Zno ◽

Filtered Cathodic Vacuum Arc ◽

Arc Deposition

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Effect of the Bias Voltage on the Structure, Mechanical, Electronic and Optical Properties of the Low Temperature ZnO Thin Films Deposited by Using Cathodic Vacuum Arc Deposition System on Plastic Substrates

Materials Science Forum ◽

10.4028/www.scientific.net/msf.773-774.287 ◽

2013 ◽

Vol 773-774 ◽

pp. 287-292

Author(s):

Ru Yuan Yang ◽

Cheng Tang Pan ◽

Chien Wei Huang

Keyword(s):

Thin Films ◽

Low Temperature ◽

Bias Voltage ◽

Zno Thin Films ◽

Vacuum Arc ◽

Substrate Bias ◽

Substrate Bias Voltage ◽

Plastic Substrates ◽

Vacuum Arc Deposition ◽

Arc Deposition

The un-doped zinc oxide (ZnO) ﬁlms on the polyethylene terephthalate (PET) substrate at a low temperature (<75°C) by using cathode vacuum arc deposition (CVAD) system with different negative substrate bias voltage applied between 0 and -100 V. The material, mechanical, optical and electrical properties were investigated and discussed. The results show that all ZnO thin films have (002) preferred orientation, an average transmittance was over than 70 % in the visible region. Calculated band gap values are all around 3.2 eV with the different substrate bias voltages. The ZnO thin films with resistivities as low as 10-3Ω*cm have been obtained by adjusting the substrate bias voltage on the plastic substrates.

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