Two-degree-of-freedom displacement measurement system based on double diffraction gratings

2016 ◽  
Vol 27 (7) ◽  
pp. 074012 ◽  
Author(s):  
Zhengang Lu ◽  
Peipei Wei ◽  
Chaoqun Wang ◽  
Jialei Jing ◽  
Jiubin Tan ◽  
...  
Keyword(s):  
Measurement System ◽  
Diffraction Gratings ◽  
Degree Of Freedom ◽  
Displacement Measurement ◽  
Double Diffraction ◽  
Two Degree Of Freedom

Six-degree-of-freedom displacement measurement system using a diffraction grating

2000 ◽  
Vol 71 (8) ◽  
pp. 3214-3219 ◽  
Author(s):  
Jong-Ahn Kim ◽  
Kyung-Chan Kim ◽  
Eui Won Bae ◽  
Soohyun Kim ◽  
Yoon Keun Kwak
Keyword(s):  
Measurement System ◽  
Diffraction Grating ◽  
Degree Of Freedom ◽  
Displacement Measurement ◽  
Six Degree Of Freedom

Multi-degree-of-freedom displacement measurement system using a diffraction grating

2000 ◽  
Author(s):  
Jong-Ahn Kim ◽  
Kyung-Chan Kim ◽  
Eui W. Bae ◽  
Soo Hyun Kim ◽  
Yoon Keun Kwak
Keyword(s):  
Measurement System ◽  
Diffraction Grating ◽  
Degree Of Freedom ◽  
Displacement Measurement

scholarly journals Two Degree-of-Freedom Fiber-Coupled Heterodyne Grating Interferometer with Milli-Radian Operating Range of Rotation

Sensors ◽  
2019 ◽  
Vol 19 (14) ◽  
pp. 3219 ◽  
Author(s):  
Fuzhong Yang ◽  
Ming Zhang ◽  
Yu Zhu ◽  
Weinan Ye ◽  
Leijie Wang ◽  
...  
Keyword(s):  
Angular Displacement ◽  
Reference Beam ◽  
Angular Position ◽  
Degree Of Freedom ◽  
Displacement Measurement ◽  
Operating Range ◽  
Out Of Plane ◽  
Grating Interferometer ◽  
To Receive ◽  
Two Degree Of Freedom

In the displacement measurement of the wafer stage in lithography machines, signal quality is affected by the relative angular position between the encoder head and the grating. In this study, a two-degree-of-freedom fiber-coupled heterodyne grating interferometer with large operating range of rotation is presented. Fibers without fiber couplers are utilized to receive the interference beams for high-contrast signals under the circumstances of large angular displacement and ZEMAX ray tracing software simulation and experimental validation have been carried out. Meanwhile, a reference beam generated inside the encoder head is adopted to suppress the thermal drift of the interferometer. Experimental results prove that the proposed grating interferometer could realize sub-nanometer displacement measurement stability in both in-plane and out-of-plane directions, which is 0.246 nm and 0.465 nm of 3σ value respectively within 30 s.

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