Characterization of the end-of-range geometric effects in complex 3D silicon micro-components formed by proton beam writing
2010 ◽
Vol 20
(6)
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pp. 064015
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2008 ◽
Vol 41
(19)
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pp. 192002
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2012 ◽
Vol 51
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pp. 048003
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2005 ◽
Vol 231
(1-4)
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pp. 372-377
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2014 ◽
Vol 32
(6)
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pp. 06F506
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2013 ◽
Vol 31
(6)
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pp. 06F403
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