High-throughput anisotropic plasma etching of polyimide for MEMS

2011 ◽  
Vol 21 (6) ◽  
pp. 067003 ◽  
Author(s):  
Vladimir Bliznetsov ◽  
Anbumalar Manickam ◽  
Junwei Chen ◽  
Nagarajan Ranganathan
Keyword(s):  
High Throughput ◽  
Plasma Etching ◽  
Anisotropic Plasma

Understanding Anisotropic Plasma Etching of Two-Dimensional Polystyrene Opals for Advanced Materials Fabrication

Langmuir ◽  
2014 ◽  
Vol 30 (41) ◽  
pp. 12354-12361 ◽  
Author(s):  
Eser M. Akinoglu ◽  
Anthony J. Morfa ◽  
Michael Giersig
Keyword(s):  
Plasma Etching ◽  
Anisotropic Plasma ◽  
Advanced Materials ◽  
Two Dimensional

Anisotropic plasma etching of polysilicon

1980 ◽  
Vol 17 (3) ◽  
pp. 721-730 ◽  
Author(s):  
C. J. Mogab ◽  
H. J. Levinstein
Keyword(s):  
Plasma Etching ◽  
Anisotropic Plasma

Performance enhancement of IPMC by anisotropic plasma etching process

2009 ◽  
Author(s):  
Seok Hwan Lee ◽  
Chul-Jin Kim ◽  
Hyun-Woo Hwang ◽  
Sung-Joo Kim ◽  
Hyun-Seok Yang ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Performance Enhancement ◽  
Anisotropic Plasma ◽  
Etching Process ◽  
Plasma Etching Process

High-etch-rate deep anisotropic plasma etching of silicon for MEMS fabrication

1998 ◽  
Author(s):  
Tam Pandhumsoporn ◽  
Lei Wang ◽  
Michael Feldbaum ◽  
Prashant Gadgil ◽  
Michel Puech ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Etch Rate ◽  
Anisotropic Plasma ◽  
Mems Fabrication ◽  
High Etch Rate

Anisotropic plasma etching of polymers using a cryo-cooled resist mask

2000 ◽  
Vol 18 (2) ◽  
pp. 385-387 ◽  
Author(s):  
B. Schüppert ◽  
E. Brose ◽  
K. Petermann ◽  
R. Moosburger
Keyword(s):  
Plasma Etching ◽  
Anisotropic Plasma

ChemInform Abstract: Anisotropic Plasma Etching of Sputtered Zinc Oxide

ChemInform ◽  
1990 ◽  
Vol 21 (47) ◽  
Author(s):  
G. D. SWANSON ◽  
T. TAMAGAWA ◽  
D. L. POLLA
Keyword(s):  
Zinc Oxide ◽  
Plasma Etching ◽  
Anisotropic Plasma
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