Silicon-based wire electrode array for neural interfaces

AbstractIn this work, we propose a new silicon-based micro-fabrication technology to fabricate 3D high-density high-electrode-count neural micro-probe arrays scalable to thousands and even millions of individual electrodes with user-defined length, width, shape, and tip profile. This unique technology utilizes DRIE of ultra-high aspect-ratio holes in silicon and refilling them with multiple films to form thousands of individual needles with metal tips making up the “sea-of-electrodes” array (SEA). World-record density of 400 electrodes/mm2 in a 5184-needle array is achieved. The needles are ~0.5-1.2mm long, <20μm wide at the base, and <1μm at the tip. The silicon-based structure of these 3D array probes with sharp tips, makes them stiff enough and easily implantable in the brain to reach a targeted region without failing. Moreover, the high aspect ratio of these extremely fine needles reduces the tissue damage and improves the chronic stability. Functionality of the electrodes is investigated using acute in vivo recording in a rat barrel field cortex under isoflurane anesthesia.

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Reliability of Signals From a Chronically Implanted, Silicon-Based Electrode Array in Non-Human Primate Primary Motor Cortex

IEEE Transactions on Neural Systems and Rehabilitation Engineering ◽

10.1109/tnsre.2005.857687 ◽

2005 ◽

Vol 13 (4) ◽

pp. 524-541 ◽

Cited By ~ 258

Author(s):

S. Suner ◽

M.R. Fellows ◽

C. Vargas-Irwin ◽

G.K. Nakata ◽

J.P. Donoghue

Keyword(s):

Motor Cortex ◽

Primary Motor Cortex ◽

Electrode Array ◽

Silicon Based ◽

Human Primate

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Electrode Array for Neural Interfaces

Micro/Nano Technologies - Micro Electro Mechanical Systems ◽

10.1007/978-981-10-5945-2_42 ◽

2018 ◽

pp. 1437-1465 ◽

Cited By ~ 1

Author(s):

Weihua Pei ◽

Hongda Chen

Keyword(s):

Electrode Array ◽

Neural Interfaces

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Characterization of Mechanical Properties of Single Electrodes and Multielectrodes

Annals of Otology Rhinology & Laryngology ◽

10.1177/00034894870960s121 ◽

1987 ◽

Vol 96 (1_suppl) ◽

pp. 46-48 ◽

Cited By ~ 11

Author(s):

J. F. Patrick ◽

J. C. MacFarlane

Keyword(s):

Mechanical Properties ◽

Temporal Bone ◽

Electrode Array ◽

Maximum Force ◽

Wire Electrode ◽

Potential Damage

Over recent years there has been increasing awareness of the potential damage to the fragile structures of the cochlea that could be caused by the insertion of intracochlear electrodes. Temporal bone histologic studies from chronically implanted human patients have shown that intracochlear electrodes can cause significant insertion trauma. This paper describes how the mechanical properties of the electrode array can influence insertion trauma, and compares the properties of solid wire electrodes with those of a tapered electrode array. The maximum force that can be applied by the tip of the solid wire electrode is 25 times what can be applied by the tapered electrode array, whereas the tapered array is ten times more flexible. These differences in mechanical properties suggest that evidence for insertion trauma should be assessed on an electrode-by-electrode basis.

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