A simple analysis of an inductive RF discharge

1992 ◽  
Vol 1 (3) ◽  
pp. 179-186 ◽  
Author(s):  
R B Piejak ◽  
V A Godyak ◽  
B M Alexandrovich
Keyword(s):  
Rf Discharge ◽  
Simple Analysis ◽  
Inductive Rf Discharge

New Inductive rf Discharge Using an Internal Metal Antenna

1995 ◽  
Vol 34 (Part 2, No. 12B) ◽  
pp. L1686-L1688 ◽  
Author(s):  
Keiji Nakamura ◽  
Yukiyasu Kuwashita ◽  
Hideo Sugai
Keyword(s):  
Rf Discharge ◽  
Inductive Rf Discharge ◽  
Metal Antenna

Inductive RF-discharge of low pressure in a magnetic field

2003 ◽  
Author(s):  
A.M. Bystrov ◽  
M.E. Guschin ◽  
A.V. Kostrov ◽  
A.V. Strikovsky ◽  
A.I. Smirnov ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Low Pressure ◽  
Rf Discharge ◽  
Inductive Rf Discharge

Properties of a low-pressure inductive RF discharge II: Mathematical simulations

2007 ◽  
Vol 33 (9) ◽  
pp. 746-756 ◽  
Author(s):  
A. F. Aleksandrov ◽  
K. V. Vavilin ◽  
E. A. Kral’kina ◽  
V. B. Pavlov ◽  
A. A. Rukhadze
Keyword(s):  
Low Pressure ◽  
Rf Discharge ◽  
Mathematical Simulations ◽  
Inductive Rf Discharge
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