Assessment of self-consistent analytic model for inductive RF discharge and design of uniform discharge with planar-vertical antennas
1996 ◽
Vol 24
(3)
◽
pp. 1155-1164
◽
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2003 ◽
Vol 7
(3)
◽
pp. 357-366
2017 ◽
Vol 115
◽
pp. 04001
◽
1992 ◽
Vol 1
(3)
◽
pp. 179-186
◽
2000 ◽
Vol 5
(S1)
◽
pp. 970-976
Keyword(s):
Keyword(s):
1995 ◽
Vol 34
(Part 2, No. 12B)
◽
pp. L1686-L1688
◽
2000 ◽
Vol 39
(Part 1, No. 2A)
◽
pp. 598-601
◽
Keyword(s):