Investigation and optimization of the magnetic field configuration in high-power impulse magnetron sputtering
2013 ◽
Vol 22
(4)
◽
pp. 045012
◽
Keyword(s):
1971 ◽
Vol 43
◽
pp. 243-248
◽
1998 ◽
Vol 164
◽
pp. 115-116
◽
Keyword(s):
1990 ◽
Vol 140
◽
pp. 54-54
Keyword(s):