The formation mechanism of nonuniformity from 2D nonlocal particle-dynamics in capacitive RF discharges

Author(s):  
Chang Ho Kim ◽  
Hwanho Kim ◽  
Geonwoo Park ◽  
Hae June Lee
2018 ◽  
Vol 17 (4) ◽  
pp. 172-179 ◽  
Author(s):  
Eiji SHINSHO ◽  
Koji OKUWAKI ◽  
Hideo DOI ◽  
Yuji MOCHIZUKI ◽  
Takayuki FURUISHI ◽  
...  

1998 ◽  
Vol 08 (PR6) ◽  
pp. Pr6-109-Pr6-113
Author(s):  
P. Gallo ◽  
F. Sciortino ◽  
P. Tartaglia ◽  
S.-H. Chen

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