Microstructure evolution and passivation quality of hydrogenated amorphous silicon oxide (a-SiOx:H) on 〈100〉- and 〈111〉-orientated c-Si wafers
2015 ◽
2013 ◽
Vol 13
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pp. 7826-7833
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1999 ◽
Vol 254
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pp. 74-79
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pp. 977-980
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pp. 122402
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2018 ◽
Vol 762
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pp. 616-620
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