A novel method for simultaneous measurement of thickness, refractive index, bow, and warp of a large silicon wafer using a spectral-domain interferometer

Spectral Domain ◽

Novel Method ◽

Line-Field Swept-Source Interferometer for Simultaneous Measurement of Thickness and Refractive Index Distribution

Journal of Lightwave Technology ◽

10.1109/jlt.2016.2605300 ◽

2017 ◽

Vol 35 (16) ◽

pp. 3584-3590 ◽

Cited By ~ 5

Author(s):

Soon-Woo Cho ◽

Gyeong Hun Kim ◽

Moonju Kim ◽

Bo Sung Shin ◽

Chang-Seok Kim

Keyword(s):

Refractive Index ◽

Refractive Index Distribution ◽

Line Field ◽

Swept Source ◽

Index Distribution ◽

Simultaneous Measurement of Thickness and Refractive Index of Transparent Material Using a Collimated Beam Having a Finite Radius

Korean Journal of Optics and Photonics ◽

10.3807/hkh.2009.20.1.029 ◽

2009 ◽

Vol 20 (1) ◽

pp. 29-33 ◽

Cited By ~ 2

Author(s):

Dae-Seo Park ◽

Beom-Hoan O ◽

Se-Geun Park ◽

El-Hang Lee ◽

Seung-Gol Lee

Keyword(s):

Refractive Index ◽

Transparent Material ◽

Finite Radius ◽

Measurement Of Thickness ◽

Collimated Beam

2017 6th International Conference on Computer Applications In Electrical Engineering-Recent Advances (CERA) ◽

Simultaneous measurement of thickness and refractive index using wedge plate lateral shearing interferometry and fourier transform method

10.1109/cera.2017.8343359 ◽

2017 ◽

Author(s):

Amit Chatterjee ◽

Jitendra Dhanotia ◽

Vimal Bhatia ◽

Reena Disawal ◽

Shashi Prakash

Keyword(s):

Refractive Index ◽

Fourier Transform ◽

Transform Method ◽

Fourier Transform Method ◽

Shearing Interferometry ◽

Lateral Shearing ◽

Wedge Plate ◽

Measurement Of Thickness ◽

Lateral Shearing Interferometry

Simultaneous measurement of thickness and refractive index by a single-channel self-mixing interferometer

IET Optoelectronics ◽

10.1049/iet-opt.2011.0044 ◽

2012 ◽

Vol 6 (1) ◽

pp. 7 ◽

Cited By ~ 8

Author(s):

M.T. Fathi ◽

S. Donati

Keyword(s):

Refractive Index ◽

Single Channel ◽

Simultaneous Measurement of Thickness and Refractive Index using Spectrum Multiplexing Digital Holographic Microscopy

Imaging and Applied Optics 2016 ◽

10.1364/dh.2016.dth3f.6 ◽

2016 ◽

Author(s):

Jiwei Zhang ◽

Chaojie Ma ◽

Ying Li ◽

Jianglei Di ◽

Teli Xi ◽

...

Keyword(s):

Refractive Index ◽

Digital Holographic Microscopy ◽

Holographic Microscopy ◽

Accurate and simultaneous measurement of thickness and refractive index of thermally evaporated thin organic films by surface plasmon resonance spectroscopy

Optics Express ◽

10.1364/oe.22.018914 ◽

2014 ◽

Vol 22 (16) ◽

pp. 18914 ◽

Cited By ~ 13

Author(s):

T. Del Rosso ◽

J. Edicson Hernández Sánchez ◽

R. Dos Santos Carvalho ◽

O. Pandoli ◽

M. Cremona

Keyword(s):

Refractive Index ◽

Surface Plasmon Resonance ◽

Surface Plasmon ◽

Plasmon Resonance ◽

Organic Films ◽

Resonance Spectroscopy ◽

Surface Plasmon Resonance Spectroscopy ◽

Thin Organic Films ◽

B8.3 - Simultaneous Measurement of Thickness and Refractive Index by Chromatic Confocal Coherence Tomography (CCCT)

10.5162/sensor2017/b8.3 ◽

2017 ◽

Author(s):

T. Boettcher ◽

M. Gronle ◽

W. Osten

Keyword(s):

Refractive Index ◽

Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser

Optics Communications ◽

10.1016/j.optcom.2013.03.055 ◽

2013 ◽

Vol 305 ◽

pp. 170-174 ◽

Cited By ~ 31

Author(s):

Jungjae Park ◽

Jonghan Jin ◽

Jae Wan Kim ◽

Jong-Ahn Kim

Keyword(s):

Refractive Index ◽

Silicon Wafer ◽

Pulse Laser ◽

Femtosecond Pulse ◽

Refractive Index Variation ◽

Femtosecond Pulse Laser ◽

Thickness Profile ◽

Index Variation ◽

Simultaneous measurement of thickness and refractive index using phase shifted Coherent Gradient Sensor

Optics & Laser Technology ◽

10.1016/j.optlastec.2016.06.015 ◽

2016 ◽

Vol 86 ◽

pp. 85-92 ◽

Cited By ~ 3

Author(s):

Reena Disawal ◽

Takamasa Suzuki ◽

Shashi Prakash

Keyword(s):

Refractive Index ◽

Simultaneous Measurement of Thickness and Refractive Index of Film by Using Spectral Analysis

Transactions of the Society of Instrument and Control Engineers ◽

10.9746/sicetr1965.22.976 ◽

1986 ◽

Vol 22 (9) ◽

pp. 976-981

Author(s):

Sadao FUJIMURA ◽

Atsuki MATSUMURA

Keyword(s):

Refractive Index ◽

Spectral Analysis ◽