scholarly journals Blue luminescence of indium-doped ZnO thin films prepared by DC magnetron sputtering

2021 ◽  
Vol 1968 (1) ◽  
pp. 012045
Author(s):  
S Sugianto ◽  
N Nurilhilmah ◽  
T Darsono ◽  
S Sugiyanto ◽  
D Aryanto ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Blue Luminescence ◽  
Dc Magnetron Sputtering ◽  
Doped Zno

Preparing transparent cobalt-doped ZnO thin films by DC magnetron sputtering

2017 ◽  
Vol 4 (5) ◽  
pp. 6311-6316 ◽  
Author(s):  
Pongladda Panyajirawut ◽  
Nattha Pratumsuwan ◽  
Kornkamon Meesombad ◽  
Kridsana Thanawattana ◽  
Artit Chingsungnoen ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Doped Zno

Growth of transparent conducting nano-structured In doped ZnO thin films by pulsed DC magnetron sputtering

2008 ◽  
Vol 254 (8) ◽  
pp. 2250-2254 ◽  
Author(s):  
Young Ran Park ◽  
Eung Kwon Kim ◽  
Donggeun Jung ◽  
Tae Seok Park ◽  
Young Sung Kim
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Transparent Conducting ◽  
Pulsed Dc ◽  
Doped Zno ◽  
Pulsed Dc Magnetron Sputtering

Effect of ion beam assistance on Cu - doped ZnO thin films deposited by simultaneous RF and DC magnetron sputtering

2016 ◽  
Vol 42 (2) ◽  
pp. 3064-3071 ◽  
Author(s):  
Adem Sreedhar ◽  
Hyemin Jung ◽  
Jin Hyuk Kwon ◽  
Jonghoon Yi ◽  
Jin Seog Gwag
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Ion Beam ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Doped Zno

Ga doped ZnO thin films prepared by RF plasma assisted DC magnetron sputtering under reductive atmosphere without heating substrates

2010 ◽  
Vol 7 (6) ◽  
pp. 1559-1561 ◽  
Author(s):  
Toshio Hinoki ◽  
Kenji Yazawa ◽  
Kentaro Kinoshita ◽  
Koutoku Ohmi ◽  
Satoru Kishida
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Rf Plasma ◽  
Dc Magnetron Sputtering ◽  
Doped Zno ◽  
Reductive Atmosphere
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