scholarly journals Helmholtz Resonator for Lead Zirconate Titanate Acoustic Energy Harvester

2013 ◽  
Vol 476 ◽  
pp. 012003 ◽  
Author(s):  
Tomohiro Matsuda ◽  
Kazuki Tomii ◽  
Saori Hagiwara ◽  
Shuntaro Miyake ◽  
Yuichi Hasegawa ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Energy Harvester ◽  
Helmholtz Resonator ◽  
Lead Zirconate ◽  
Acoustic Energy ◽  
Zirconate Titanate

Lead-Zirconate-Titanate Acoustic Energy Harvester Equipped with Sound-Collecting Helmholtz Resonator

2013 ◽  
Vol E96.C (5) ◽  
pp. 722-725 ◽  
Author(s):  
Tomohiro MATSUDA ◽  
Kazuki TOMII ◽  
Satoshi IIZUMI ◽  
Shungo TOMIOKA ◽  
Shu KIMURA ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Energy Harvester ◽  
Helmholtz Resonator ◽  
Lead Zirconate ◽  
Acoustic Energy ◽  
Zirconate Titanate

Lead Zirconate Titanate Acoustic Energy Harvester Proposed for Microelectromechanical System/IC Integrated Systems

2010 ◽  
Vol 49 (4) ◽  
pp. 04DL21 ◽  
Author(s):  
Shigeki Shinoda ◽  
Takahiro Tai ◽  
Hisanori Itoh ◽  
Tomohisa Sugou ◽  
Hirohide Ichioka ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Energy Harvester ◽  
Lead Zirconate ◽  
Acoustic Energy ◽  
Integrated Systems ◽  
Microelectromechanical System ◽  
Zirconate Titanate

Improved Performances of Acoustic Energy Harvester Fabricated Using Sol/Gel Lead Zirconate Titanate Thin Film

2011 ◽  
Vol 50 (6S) ◽  
pp. 06GM14 ◽  
Author(s):  
Shu Kimura ◽  
Syungo Tomioka ◽  
Satoshi Iizumi ◽  
Kyohei Tsujimoto ◽  
Tomohisa Sugou ◽  
...  
Keyword(s):  
Thin Film ◽  
Lead Zirconate Titanate ◽  
Energy Harvester ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Acoustic Energy ◽  
Zirconate Titanate ◽  
Titanate Thin Film

Improved Performances of Acoustic Energy Harvester Fabricated Using Sol/Gel Lead Zirconate Titanate Thin Film

2011 ◽  
Vol 50 (6) ◽  
pp. 06GM14 ◽  
Author(s):  
Shu Kimura ◽  
Syungo Tomioka ◽  
Satoshi Iizumi ◽  
Kyohei Tsujimoto ◽  
Tomohisa Sugou ◽  
...  
Keyword(s):  
Thin Film ◽  
Lead Zirconate Titanate ◽  
Energy Harvester ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Acoustic Energy ◽  
Zirconate Titanate ◽  
Titanate Thin Film

Fabrication and Characterization of a Lead Zirconate Titanate Micro Energy Harvester Based on Eutectic Bonding

2011 ◽  
Vol 28 (6) ◽  
pp. 068103 ◽  
Author(s):  
Yi-Gui Li ◽  
Jian Sun ◽  
Chun-Sheng Yang ◽  
Jing-Quan Liu ◽  
Susumu Sugiyama ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Energy Harvester ◽  
Lead Zirconate ◽  
Eutectic Bonding ◽  
Zirconate Titanate ◽  
Fabrication And Characterization

PZT Acoustic Energy Harvester Arrays with Dual Top Electrodes

2013 ◽  
Vol 300-301 ◽  
pp. 912-915
Author(s):  
Yusuke Uchida ◽  
Satoshi Iizumi ◽  
Syungo Tomioka ◽  
Kyohei Tsujimoto ◽  
Kazuki Tomii ◽  
...  
Keyword(s):  
Power Generation ◽  
Lead Zirconate Titanate ◽  
Sound Pressure Level ◽  
Sound Pressure ◽  
Energy Harvester ◽  
Lead Zirconate ◽  
Pressure Level ◽  
Acoustic Energy ◽  
Microelectromechanical System ◽  
Energy Harvesters

This paper presents the power generation performances of an array of three microelectromechanical system (MEMS) acoustic energy harvesters equiped with lead–zirconate–titanate (PZT) capacitors. The PZT acoustic energy harvesters had a diaphragm with a　diameter of 2 mm consisting of Al (0.1 μm) / PZT (1 μm) / Pt (0.1 μm) / Ti (0.1 μm) / SiO2 (1.5 μm), and the diaphragm vibrations were excited by sound pressure. The arrayed peripheral energy harvester generated a maximum power of 2.26 × 10-10 W at a sound pressure level (SPL) of 100 dB at 5 kHz. The output power of three arraying devices was about 3 times larger than that of the single devices.

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