Wafer-scale growth of highly textured piezoelectric thin films by pulsed laser deposition for micro-scale sensors and actuators

ABSTRACTLead zirconate titanate thin films offer considerably larger piezoelectric coefficients than do ZnO, and so are attractive for microelectromechanical sensors and actuators. To date, much of the research in this field has concentrated on undoped PZT. In this work, PZT films grown from both hard and soft PZT targets have been deposited on platinum coated silicon wafers by pulsed laser deposition so that the effect of doping on the properties can be determined. Dielectric constants of 1000–1500 are regularly achieved in both types of films, with loss values varying from 0.01 for soft films to 0.03 for hard films. Remanent polarizations are typically 30 μC/cm2 for both types of films with no observable difference in coercive fields. When subjected to ∼140 MPa of biaxial tension and compression, only small (∼5%) reversible changes were observed, indicating a lack of substantial domain reorientation in the films.

Download Full-text

Growth of piezoelectric thin films with fine grain microstructure by high energy pulsed laser deposition

Sensors and Actuators A Physical ◽

10.1016/s0924-4247(98)00341-0 ◽

1999 ◽

Vol 74 (1-3) ◽

pp. 35-40 ◽

Cited By ~ 3

Author(s):

F. Craciun ◽

P. Verardi ◽

M. Dinescu ◽

C. Galassi ◽

A. Costa

Keyword(s):

Thin Films ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

High Energy ◽

Laser Deposition ◽

Piezoelectric Thin Films ◽

Fine Grain

Download Full-text

High piezoelectric performance of lead-free BiFeO3–BaTiO3 thin films grown by a pulsed laser deposition method

RSC Advances ◽

10.1039/c6ra22271d ◽

2016 ◽

Vol 6 (108) ◽

pp. 106899-106903 ◽

Cited By ~ 3

Author(s):

Jinsu Park ◽

Myang Hwan Lee ◽

Da Jeong Kim ◽

Myong-Ho Kim ◽

Won-Jeong Kim ◽

...

Keyword(s):

Thin Films ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Lead Free ◽

Silicon Substrates ◽

Deposition Method ◽

Piezoelectric Thin Films ◽

Piezoelectric Performance

Lead-free (100 − x)BiFeO3–xBaTiO3 (BFBTx, x = 0, 30, 33, 40 and 50) piezoelectric thin films were deposited on platinized silicon substrates by using a pulsed laser deposition method.

Download Full-text

Growth and Crystallization of SiO2/GeO2 Thin Films on Si(100) Substrates

Nanomaterials ◽

10.3390/nano11071654 ◽

2021 ◽

Vol 11 (7) ◽

pp. 1654

Author(s):

Jordi Antoja-Lleonart ◽

Václav Ocelík ◽

Silang Zhou ◽

Kit de Hond ◽

Gertjan Koster ◽

...

Keyword(s):

Thin Films ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Electron Back Scatter Diffraction ◽

Laser Deposition ◽

X Ray Diffraction ◽

Top Down ◽

Crystalline Orientation ◽

X Ray ◽

Piezoelectric Thin Films

The growth of α-quartz-based piezoelectric thin films opens the door to higher-frequency electromechanical devices than those available through top-down approaches. We report on the growth of SiO2/GeO2 thin films by pulsed laser deposition and their subsequent crystallization. By introducing a devitrifying agent uniformly within the film, we are able to obtain the α-quartz phase in the form of platelets with lateral sizes above 100 μm at accessible temperatures. Films containing different amounts of devitrifying agent are investigated, and their crystallinity is ascertained with X-ray diffraction and electron back-scatter diffraction. Our work highlights the difficulty in crystallization when competing phases arise that have markedly different crystalline orientation.

Download Full-text