scholarly journals Analysis of the influence of inductance and capacitance on film bulk acoustic wave filter

2021 ◽  
Vol 1043 (5) ◽  
pp. 052061
Author(s):  
C R Peng ◽  
G Liu ◽  
H Zhong ◽  
Y Shi
Keyword(s):  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Film Bulk ◽  
Wave Filter

Thin film bulk acoustic wave filter

2002 ◽  
Vol 49 (4) ◽  
pp. 535-539 ◽  
Author(s):  
M. Ylilammi ◽  
J. Ella ◽  
M. Partanen ◽  
J. Kaitila
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Film Bulk ◽  
Wave Filter

scholarly journals Full Wave Simulation and Design of Film Bulk Acoustic Wave Filters

2018 ◽  
Vol 160 ◽  
pp. 01005
Author(s):  
Du Bo ◽  
Lin Jian ◽  
Ou Li ◽  
Shi Yu ◽  
MA Jin-yi
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Insertion Loss ◽  
Bulk Acoustic Wave ◽  
Three Dimension ◽  
Magnetic Components ◽  
Film Bulk ◽  
Magnetic Model ◽  
Electro Magnetic ◽  
Wave Filter

In order to simulate the frequency response of thin film bulk acoustic wave filter accurately, the MBVD model of film bulk acoustic wave filter chip and three dimension electro-magnetic model of package were respectively established. And then, the collaborative simulation of acoustic and electro-magnetic components was realized in ADS software. Finally, thin film bulk acoustic wave filter with working frequency of 2.825GHz and 5.6 GHz were designed and fabricated by this method. Insertion loss of 2.825GHz FBAR filter is less than 1.5dB, and rejection is more than 40dB. Insertion loss of 5.6GHz FBAR filter is less than 1.7dB, and rejection is more than 30dB. The simulation and experimental results show that the proposed method has good design precision and can simulate the influence of package on the performance of the filter accurately.

scholarly journals Selective normal mode excitation in multilayer thin film bulk acoustic wave resonators

2014 ◽  
Vol 105 (16) ◽  
pp. 162910 ◽  
Author(s):  
Andrey Kozyrev ◽  
Anatoly Mikhailov ◽  
Sergey Ptashnik ◽  
Peter K. Petrov ◽  
Neil Alford
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Normal Mode ◽  
Bulk Acoustic Wave ◽  
Multilayer Thin Film ◽  
Mode Excitation ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

scholarly journals The thin film bulk acoustic wave resonator based on single-crystalline 43○Y-cut lithium niobate thin films

AIP Advances ◽  
2020 ◽  
Vol 10 (7) ◽  
pp. 075002
Author(s):  
Xiaoyuan Bai ◽  
Yao Shuai ◽  
Lu Lv ◽  
Ying Xing ◽  
Jiaoling Zhao ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Lithium Niobate ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Single Crystalline ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk

Simulation and fabrication of thin film bulk acoustic wave resonator

2016 ◽  
Vol 37 (7) ◽  
pp. 074009
Author(s):  
Xixi Han ◽  
Yi Ou ◽  
Zhigang Li ◽  
Wen Ou ◽  
Dapeng Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk
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