Checkerboard deposition of lithium manganese oxide spinel (LiMn2O4) by RF magnetron sputtering on a stainless steel in all-solid-state thin film battery

The amorphous LiPON thin film was obtained by using the crystalline Li3PO4 target and the RF magnetron sputtering method at a N2 working pressure of 1 Pa. and then the morphology and composition of LiPON thin films are analysed by SEM and EDS. SEM shows that the film was compact and smooth, while EDS shows that the content of N in LiPON thin film was about 17.47%. The electrochemical properties of Pt/LiPON/Pt were analysed by EIS, and the ionic conductivity of LiPON thin films was 3.8×10-7 S/cm. By using the hard mask in the magnetron sputtering process, the all-solid-state thin film battery with Si/Ti/Pt/LiCoO2/LiPON/Li4Ti5O12/Pt structure was prepared, and its electrical properties were studied. As for this thin film battery, the open circuit voltage was 1.9 V and the first discharge specific capacity was 34.7 μAh/cm2·μm at a current density of 5 μA/cm-2, indicating that is promising in all-solidstate thin film batteries.

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PROPERTIES OF ALL-SOLID-STATE LITHIUM-ION RECHARGEABLE BATTERIES DEPOSITED BY RF MAGNETRON SPUTTERING

Modern Physics Letters B ◽

10.1142/s021798491350156x ◽

2013 ◽

Vol 27 (22) ◽

pp. 1350156 ◽

Cited By ~ 2

Author(s):

R. J. ZHU ◽

Y. REN ◽

L. Q. GENG ◽

T. CHEN ◽

L. X. LI ◽

...

Keyword(s):

Thin Film ◽

Thin Films ◽

Solid State ◽

Magnetron Sputtering ◽

Coulombic Efficiency ◽

Electronic Conductivity ◽

Lithium Ion ◽

Rf Magnetron Sputtering ◽

Rechargeable Batteries ◽

Voltage Range

Amorphous V 2 O 5, LiPON and Li 2 Mn 2 O 4 thin films were fabricated by RF magnetron sputtering methods and the morphology of thin films were characterized by scanning electron microscopy. Then with these three materials deposited as the anode, solid electrolyte, cathode, and vanadium as current collector, a rocking-chair type of all-solid-state thin-film-type Lithium-ion rechargeable battery was prepared by using the same sputtering parameters on stainless steel substrates. Electrochemical studies show that the thin film battery has a good charge–discharge characteristic in the voltage range of 0.3–3.5 V, and after 30 cycles the cell performance turned to become stabilized with the charge capacity of 9 μAh/cm2, and capacity loss of single-cycle of about 0.2%. At the same time, due to electronic conductivity of the electrolyte film, self-discharge may exist, resulting in approximately 96.6% Coulombic efficiency.

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Synthesis and structures of lithium manganese oxide spinel, LiMn2O4−δ (0≤δ≤0.27)

Journal of Power Sources ◽

10.1016/s0378-7753(01)00687-5 ◽

2001 ◽

Vol 97-98 ◽

pp. 423-426 ◽

Cited By ~ 19

Author(s):

Ryoji Kanno ◽

Masao Yonemura ◽

Tomoko Kohigashi ◽

Yoji Kawamoto ◽

Mitsuharu Tabuchi ◽

...

Keyword(s):

Manganese Oxide ◽

Lithium Manganese Oxide ◽

Spinel Limn2o4 ◽

Lithium Manganese ◽

Oxide Spinel ◽

Lithium Manganese Oxide Spinel

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Microstructural Characterization of La-Cr-O Thin Film Deposited by RF Magnetron Sputtering on the Stainless Steel Interconnect Materials for SOFC Application

NATO Science Series - Fuel Cell Technologies: State and Perspectives ◽

10.1007/1-4020-3498-9_41 ◽

2006 ◽

pp. 355-371

Author(s):

N. Orlovskaya ◽

A. Nicholls ◽

S. Yarmolenko ◽

J. Sankar ◽

C. Johnson ◽

...

Keyword(s):

Thin Film ◽

Stainless Steel ◽

Magnetron Sputtering ◽

Microstructural Characterization ◽

Rf Magnetron Sputtering

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A Thin Film Solid State Nicrobattery for Use in Powering Nicrosensors

MRS Proceedings ◽

10.1557/proc-210-31 ◽

1990 ◽

Vol 210 ◽

Cited By ~ 4

Author(s):

Steven D. Jones ◽

James R. Akridge ◽

Susan G. Humphrey ◽

Chung-Chiun Liu ◽

J. Sarradin

Keyword(s):

Thin Film ◽

Aqueous Solution ◽

Solid State ◽

Magnetron Sputtering ◽

Counter Electrode ◽

Rf Magnetron Sputtering ◽

Vacuum Evaporation ◽

Solid Oxide ◽

Ag Electrode ◽

Current Densities

AbstractA thin film solid state microbattery has been used to power an O2 microsensor. The microbattery was fabricated using RF magnetron sputtering for the solid oxide/sulfide electrolyte and the TiS2 cathode. Vacuum evaporation was used for the deposition of LiI and Li anode. rhe microbattery is approximately 10 µm in thickness. The microbattery has an OCV of 2.4-2.5 V and shows close to 100% utilization to a 1.8 V cutoff when discharged between 10 and 135 µA/cm2. The microbattery is capable of supplying 2 second pulses of greater than 2 mA/cm2. The microbattery is rechargeable with over 200 cycles of 70% utilization to a 1.8 V cutoff at current densities up to 135 µA/cm2.The O2 microsensor consists of a silk-screened Au working and Ag electrode. The Ag electrode was anodized to provide an Ag/AgCl counter electrode. The current produced at the sensor is proportional to the dissolved O2 concentration of an aqueous solution upon application of 0.6 V between the two electrodes.

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