Solid electrolyte of tantalum oxide thin film deposited by reactive DC and RF magnetron sputtering for all-solid-state switchable mirror glass

Amorphous V 2 O 5, LiPON and Li 2 Mn 2 O 4 thin films were fabricated by RF magnetron sputtering methods and the morphology of thin films were characterized by scanning electron microscopy. Then with these three materials deposited as the anode, solid electrolyte, cathode, and vanadium as current collector, a rocking-chair type of all-solid-state thin-film-type Lithium-ion rechargeable battery was prepared by using the same sputtering parameters on stainless steel substrates. Electrochemical studies show that the thin film battery has a good charge–discharge characteristic in the voltage range of 0.3–3.5 V, and after 30 cycles the cell performance turned to become stabilized with the charge capacity of 9 μAh/cm2, and capacity loss of single-cycle of about 0.2%. At the same time, due to electronic conductivity of the electrolyte film, self-discharge may exist, resulting in approximately 96.6% Coulombic efficiency.

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Fabrication and Testing of All-solid-state Nanoscale Lithium Batteries Using LiPON for Electrolytes

E3S Web of Conferences ◽

10.1051/e3sconf/20185301008 ◽

2018 ◽

Vol 53 ◽

pp. 01008

Author(s):

Feihu Tan ◽

XiaoPing Liang ◽

Feng Wei ◽

Jun Du

Keyword(s):

Thin Film ◽

Thin Films ◽

Solid State ◽

Magnetron Sputtering ◽

Specific Capacity ◽

Rf Magnetron Sputtering ◽

Open Circuit ◽

Working Pressure ◽

Thin Film Battery ◽

A Current

The amorphous LiPON thin film was obtained by using the crystalline Li3PO4 target and the RF magnetron sputtering method at a N2 working pressure of 1 Pa. and then the morphology and composition of LiPON thin films are analysed by SEM and EDS. SEM shows that the film was compact and smooth, while EDS shows that the content of N in LiPON thin film was about 17.47%. The electrochemical properties of Pt/LiPON/Pt were analysed by EIS, and the ionic conductivity of LiPON thin films was 3.8×10-7 S/cm. By using the hard mask in the magnetron sputtering process, the all-solid-state thin film battery with Si/Ti/Pt/LiCoO2/LiPON/Li4Ti5O12/Pt structure was prepared, and its electrical properties were studied. As for this thin film battery, the open circuit voltage was 1.9 V and the first discharge specific capacity was 34.7 μAh/cm2·μm at a current density of 5 μA/cm-2, indicating that is promising in all-solidstate thin film batteries.

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Development of a highly transparent, low-resistance lithium-doped nickel oxide triple-layer film deposited by magnetron sputtering

Chemical Communications ◽

10.1039/c6cc08738h ◽

2017 ◽

Vol 53 (10) ◽

pp. 1634-1637 ◽

Cited By ~ 8

Author(s):

Chia-Ching Wu ◽

Wei-Chen Shih

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Nickel Oxide ◽

Transparent Conductive Oxide ◽

Rf Magnetron Sputtering ◽

Oxide Thin Film ◽

Glass Substrates ◽

Triple Layer ◽

Conductive Oxide

This research presents a triple-layer transparent conductive oxide thin film, with a lithium-doped nickel oxide/silver/lithium-doped nickel oxide (L-NiO/Ag/L-NiO) structure using radio-frequency (RF) magnetron sputtering on glass substrates.

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