Synthesis and characterization of Titanium Silicon Nitride (TiSiN) thin film: A review
2018 ◽
Vol 377
◽
pp. 012181
◽
Spandan Guha
◽
Asish Bandyopadhyay
◽
Santanu Das
◽
Bibhu Prasad Swain
Ibtissem Ounifi
◽
Youssef Guesmi
◽
Claudia Ursino
◽
Roberto Castro-Muñoz
◽
Hassen Agougui
◽
...
1999 ◽
Vol 75
(11)
◽
pp. 1521-1523
◽
Jae-Sik Min
◽
Hyung-Sang Park
◽
Sang-Won Kang
2018 ◽
Vol 11
(7)
◽
pp. 1144-1153
◽
T. Sirinupong
◽
W. Youravong
◽
D. Tirawat
◽
W.J. Lau
◽
G.S. Lai
◽
...
2012 ◽
Vol 12
(5)
◽
pp. 4299-4304
◽
Hye Jin Koh
◽
Sang Hun Jang
◽
Chul Young Kim
◽
Sung Chul Shin
◽
Yun-Hi Kim
◽
...
2011 ◽
Vol 509
(6)
◽
pp. 2948-2951
◽
P.P. Hankare
◽
B.V. Jadhav
◽
P.A. Chate
◽
D.J. Sathe
◽
I.S. Mulla
Subhash M. Pandharkar
◽
Sachin R. Rondiya
◽
Avinash V. Rokade
◽
Bharat B. Gabhale
◽
Habib M. Pathan
◽
...
2018 ◽
Vol 4
(10)
◽
pp. 1021-1021
Yoshihiro Shimazu
◽
Yutaro Fujisawa
◽
Kensuke Arai
◽
Tatsuya Iwabuchi
◽
Kazuya Suzuki
2008 ◽
Vol 46
(15)
◽
pp. 5115-5122
◽
Yinam Li
◽
Tae‐Hoon Kim
◽
Qinghua Zhao
◽
Euh‐Kyung Kim
◽
Seung‐Hon Han
◽
...
2014 ◽
Vol 14
(8)
◽
pp. 5942-5946
◽
Hui-Jun Yun
◽
Jong-Man Park
◽
Chan Woo Jeon
◽
Sang Yong Nam
◽
Sung-Chul Shin
◽
...
2007 ◽
Vol 48
(24)
◽
pp. 7078-7086
◽
Aravindaraj G. Kannan
◽
Namita Roy Choudhury
◽
Naba K. Dutta