titanium silicon nitride Recently Published Documents

Titanium Silicon Nitride Films With Low Silicon Content Deposited via Reactive High-Power Pulsed Sputtering Penning Discharge

IEEE Transactions on Plasma Science ◽

10.1109/tps.2020.3012159 ◽

2020 ◽

pp. 1-8

Author(s):

Takashi Kimura ◽

Ryo Yoshida ◽

Kingo Azuma

Keyword(s):

Silicon Nitride ◽

High Power ◽

Silicon Content ◽

Silicon Nitride Films ◽

Synthesis and characterization of Titanium Silicon Nitride (TiSiN) thin film: A review

IOP Conference Series Materials Science and Engineering ◽

10.1088/1757-899x/377/1/012181 ◽

2018 ◽

Vol 377 ◽

pp. 012181 ◽

Cited By ~ 1

Author(s):

Spandan Guha ◽

Asish Bandyopadhyay ◽

Santanu Das ◽

Bibhu Prasad Swain

Keyword(s):

Thin Film ◽

Silicon Nitride ◽

Synthesis And Characterization ◽

Investigation of structural network and mechanical properties of Titanium silicon nitride (TiSiN) thin films

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2017.09.340 ◽

2018 ◽

Vol 731 ◽

pp. 347-353 ◽

Cited By ~ 9

Author(s):

Spandan Guha ◽

Soham Das ◽

Asish Bandyopadhyay ◽

Santanu Das ◽

Bibhu P. Swain

Keyword(s):

Thin Films ◽

Mechanical Properties ◽

Silicon Nitride ◽

Structural Network ◽

Investigation of mechanical properties of CVD grown titanium silicon nitride thin films under reduced atmosphere

Applied Physics A ◽

10.1007/s00339-017-1455-7 ◽

2017 ◽

Vol 124 (1) ◽

Cited By ~ 9

Author(s):

Spandan Guha ◽

Soham Das ◽

Asish Bandyopadhyay ◽

Santanu Das ◽

Bibhu P. Swain

Keyword(s):

Thin Films ◽

Mechanical Properties ◽

Silicon Nitride ◽

Lecture Notes in Electrical Engineering - Advances in Electronics, Communication and Computing ◽

Investigation of Titanium Silicon Nitride: A Review

10.1007/978-981-10-4765-7_18 ◽

2017 ◽

pp. 169-179

Author(s):

Spandan Guha ◽

Asish Bandyopadhyay ◽

Santanu Das ◽

Bibhu Prasad Swain

Keyword(s):

Silicon Nitride ◽

Pt nanoparticles supported on one-dimensional (1D) titanium silicon nitride with high performance and stability for methanol electrooxidation

Journal of Materials Science ◽

10.1007/s10853-017-1242-z ◽

2017 ◽

Vol 52 (18) ◽

pp. 10686-10696 ◽

Cited By ~ 3

Author(s):

Jun Xiao ◽

Zhanchang Pan ◽

Wuyi Li ◽

Xiaoxiang Chen ◽

Shoukun Wu ◽

...

Keyword(s):

Silicon Nitride ◽

High Performance ◽

Pt Nanoparticles ◽

Methanol Electrooxidation ◽

One Dimensional ◽

Evaluation of titanium silicon nitride as gate electrodes for complementary metal-oxide semiconductor

Applied Physics Letters ◽

10.1063/1.2188380 ◽

2006 ◽

Vol 88 (14) ◽

pp. 142113 ◽

Cited By ~ 8

Author(s):

H. Luan ◽

H. N. Alshareef ◽

H. R. Harris ◽

H. C. Wen ◽

K. Choi ◽

...

Keyword(s):

Silicon Nitride ◽

Metal Oxide ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Gate Electrodes ◽

Plasma-Enhanced ALD of Titanium-Silicon-Nitride Using TiCl[sub 4], SiH[sub 4], and N[sub 2]/H[sub 2]/Ar Plasma

Electrochemical and Solid-State Letters ◽

10.1149/1.1764413 ◽

2004 ◽

Vol 7 (8) ◽

pp. C87 ◽

Cited By ~ 9

Author(s):

Jin-Seong Park ◽

Sang-Won Kang

Keyword(s):

Silicon Nitride ◽

Ar Plasma ◽

Reactions of Tetrakis(dimethylamide)−Titanium, −Zirconium and −Hafnium with Silanes: Synthesis of Unusual Amide Hydride Complexes and Mechanistic Studies of Titanium−Silicon−Nitride (Ti−Si−N) Formation

Journal of the American Chemical Society ◽

10.1021/ja010744s ◽

2001 ◽

Vol 123 (33) ◽

pp. 8011-8021 ◽

Cited By ~ 29

Author(s):

Xiaozhan Liu ◽

Zhongzhi Wu ◽

Hu Cai ◽

Yihui Yang ◽

Tianniu Chen ◽

...

Keyword(s):

Silicon Nitride ◽

Mechanistic Studies ◽

Hydride Complexes ◽

Titanium Zirconium ◽