This paper presents our work over the last decade in developing functional microrobotic systems, which include wireless actuation of microrobots to traverse complex surfaces, addition of sensing capabilities, and independent actuation of swarms of microrobots. We will discuss our work on the design, fabrication, and testing of a number of different mobile microrobots that are able to achieve these goals. These microrobots include the microscale magnetorestrictive asymmetric bimorph microrobot (
μ
MAB), our first attempt at magnetic actuation in the microscale; the microscale tumbling microrobot (
μ
TUM), our microrobot capable of traversing complex surfaces in both wet and dry conditions; and the micro-force sensing magnetic microrobot (
μ
FSMM), which is capable of real-time micro-force sensing feedback to the user as well as intuitive wireless actuation. Additionally, we will present our latest results on using local magnetic field actuation for independent control of multiple microrobots in the same workspace for microassembly tasks.
Magnetic field noise analyses generated by the interactions between a nitrogen vacancy center diamond and surface and bulk impurities
