Influence of different coil geometries on the spatial distribution of the plasma density in planar inductively coupled plasmas
Keyword(s):
Keyword(s):
Keyword(s):
2006 ◽
Vol 83
(2)
◽
pp. 328-335
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Keyword(s):
Keyword(s):
2002 ◽
Vol 20
(2)
◽
pp. 325-334
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