Modelling inductively coupled plasmas: a sensitivity study on plasma chemistry and surface chemistry
2004 ◽
Vol 22
(3)
◽
pp. 511
◽
Keyword(s):
2006 ◽
Vol 83
(2)
◽
pp. 328-335
◽
Keyword(s):
Keyword(s):
2002 ◽
Vol 20
(2)
◽
pp. 325-334
◽
2009 ◽
Vol 19
(1)
◽
pp. 015011
◽
Keyword(s):