Design of reflective phase retarders in the extreme ultraviolet based on chirped Mo/Si multilayer mirrors

The extreme ultraviolet (EUV) phase retarder is an important optical element for polarization analysis and conversion of EUV synchrotron radiation. In this paper, a linearly chirped Mo/Si multilayer mirror is used to design an EUV phase retarder. With increasing thickness variation of the chirped multilayer, the reflective phase retardation between s- and p-polarized light increases at first and then reaches its maximum value. When the bilayer number increases from 2 to 20, the maximum phase retardation for an EUV source with a photon energy of 90 eV increases from 5.97° to 245.10° for a linearly chirped Mo/Si multilayer with 14.7 nm central thickness. In addition, the phase retardations of chirped mirrors at different photon energies (80 eV, 85 eV and 90 eV) are also investigated and compared. Furthermore, the physical mechanism of reflective phase retardation improvement is also studied by investigating the field intensity distributions inside chirped mirrors.

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Demonstrating 30-nm spatial resolution of three-multilayer-mirror objective for extreme ultraviolet microscopy: Imaging test by observing lithography mask

Applied Physics Express ◽

10.7567/apex.7.102502 ◽

2014 ◽

Vol 7 (10) ◽

pp. 102502 ◽

Cited By ~ 10

Author(s):

Mitsunori Toyoda ◽

Kenjiro Yamasoe ◽

Akifumi Tokimasa ◽

Kentaro Uchida ◽

Tetsuo Harada ◽

...

Keyword(s):

Spatial Resolution ◽

Extreme Ultraviolet ◽

Microscopy Imaging ◽

Multilayer Mirror ◽

Imaging Test ◽

Ultraviolet Microscopy

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Polarization analysis in the crayfish visual system

Journal of Experimental Biology ◽

10.1242/jeb.204.14.2383 ◽

2001 ◽

Vol 204 (14) ◽

pp. 2383-2390 ◽

Cited By ~ 7

Author(s):

Raymon M. Glantz

Keyword(s):

Visual System ◽

Motor Neurons ◽

Polarized Light ◽

Cell Types ◽

Afferent Input ◽

Polarization Sensitivity ◽

Polarization Analysis ◽

Low Contrast ◽

Motion Responses ◽

Light Flashes

SUMMARY It is proposed that polarization sensitivity at the most peripheral stages of the crayfish visual system (lamina ganglionaris and medulla externa) is used to enhance contrast and thus may contribute to motion detection in low contrast environments. The four classes of visual interneurons that exhibit polarization sensitivity (lamina monopolar cells, tangential cells, sustaining fibers and dimming fibers) are not sensitive exclusively to polarized light but also respond to unpolarized contrast stimuli. Furthermore, many of these cells and the sustaining fibers in particular exhibit a greater differential e-vector responsiveness to a changing e-vector than to e-vector variations among steady-state stimuli. While all four cell types respond modestly to light flashes at an e-vector of 90° to the preferred orientation, the dynamic response to a changing e-vector is small or absent at this orientation. Because the sustaining fibers exhibit polarization sensitivity, and they provide afferent input to a subset of optomotor neurons, the latter were also tested for polarization sensitivity. The optomotor neurons involved in compensatory reflexes for body pitch were differentially sensitive to the e-vector angle of a flash of light, with maximum responses for e-vectors near the vertical. The motor neurons also exhibited a maximum response near the vertical e-vector to a continuously rotating polarizer. Two scenarios are described in which the sensitivity to a changing e-vector can produce motion responses in the absence of intensity contrast.

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