Micro electrostatic actuators in dual-stage disk drives with high track density
1996 ◽
Vol 32
(5)
◽
pp. 3851-3853
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2001 ◽
Vol 40
(Part 1, No. 9B)
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pp. 5761-5765
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Keyword(s):
1999 ◽
Vol 35
(2)
◽
pp. 892-897
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Keyword(s):
2008 ◽
Vol 2
(5)
◽
pp. 853-859
Keyword(s):
2013 ◽
Vol 19
(9-10)
◽
pp. 1697-1704
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Keyword(s):
2002 ◽
Vol 228-229
◽
pp. 31-36
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2002 ◽
Vol 8
(2-3)
◽
pp. 161-168
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