Plasma-immersion ion implantation of the interior surface of a small cylindrical bore using an auxiliary electrode for finite rise-time voltage pulses

1998 ◽  
Vol 26 (2) ◽  
pp. 175-180 ◽  
Author(s):  
Xuchu Zeng ◽  
Tat-Kun Kwok ◽  
Aiguo Liu ◽  
P.K. Chu ◽  
Baoyin Tang ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Rise Time ◽  
Auxiliary Electrode ◽  
Interior Surface ◽  
Cylindrical Bore ◽  
Plasma Immersion Ion Implantation ◽  
Voltage Pulses

Plasma immersion ion implantation of the interior surface of a large cylindrical bore using an auxiliary electrode

1998 ◽  
Vol 83 (1) ◽  
pp. 44-49 ◽  
Author(s):  
X. C. Zeng ◽  
T. K. Kwok ◽  
A. G. Liu ◽  
P. K. Chu ◽  
B. Y. Tang
Keyword(s):  
Ion Implantation ◽  
Auxiliary Electrode ◽  
Interior Surface ◽  
Cylindrical Bore ◽  
Plasma Immersion Ion Implantation

Pulsed sheath dynamics in a small cylindrical bore with an auxiliary electrode for plasma immersion ion implantation

1997 ◽  
Vol 4 (12) ◽  
pp. 4431-4434 ◽  
Author(s):  
X. C. Zeng ◽  
A. G. Liu ◽  
T. K. Kwok ◽  
P. K. Chu ◽  
B. Y. Tang
Keyword(s):  
Ion Implantation ◽  
Auxiliary Electrode ◽  
Cylindrical Bore ◽  
Plasma Immersion Ion Implantation

Improving the plasma immersion ion implantation impact energy inside a cylindrical bore by using an auxiliary electrode

1996 ◽  
Vol 69 (25) ◽  
pp. 3815-3817 ◽  
Author(s):  
Xuchu Zeng ◽  
Baoyin Tang ◽  
Paul K. Chu
Keyword(s):  
Ion Implantation ◽  
Impact Energy ◽  
Auxiliary Electrode ◽  
Cylindrical Bore ◽  
Plasma Immersion Ion Implantation

Effects of the auxiliary electrode radius during plasma immersion ion implantation of a small cylindrical bore

1997 ◽  
Vol 71 (8) ◽  
pp. 1035-1037 ◽  
Author(s):  
X. C. Zeng ◽  
T. K. Kwok ◽  
A. G. Liu ◽  
P. K. Chu ◽  
B. Y. Tang ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Auxiliary Electrode ◽  
Cylindrical Bore ◽  
Plasma Immersion Ion Implantation
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