Effects of the auxiliary electrode radius during plasma immersion ion implantation of a small cylindrical bore
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1998 ◽
Vol 26
(2)
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pp. 175-180
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2011 ◽
Vol 39
(11)
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pp. 3120-3124
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2009 ◽
Vol 203
(17-18)
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pp. 2727-2730
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