The hysteresis of the piezoelectric actuator possesses the rate-dependent characteristics, which significantly affects the precision and response speed of the piezoelectric actuators. That challenges to the traditional modeling and control techniques in micro-/nano-manipulation. The static and dynamic experiments are performed to validate the rates-dependent characteristics of our proposed encapsulated piezoelectric actuator, including the preload-dependent, frequency-dependent and amplitude-dependent characteristics. In order to accurately predict the EPA output hysteresis displacement with respect to the driving voltage, the Bouc-Wen model is proposed. The corresponding parameter identification method is established to identify the parameters of the proposed Bouc-wen model. To evaluate the effectiveness of the proposed model and parameter identification method, the experimental system is implemented. The results indicate that the output displacement predicted by proposed Bouc-Wen mathematics model can match the measured data very well. The maximal absolute, relative and normalization total errors of the proposed Bouc-wen model are 0.548um, 4.26% and 0.0583 respectively, which shows the proposed Bouc-Wen model can well describe the hysteretic characteristics of the piezoelectric actuator.
Nonlinear Hysteresis Modeling of Piezoelectric Actuators Using a Generalized Bouc–Wen Model