Finite element simulation of a stress history during the manufacturing process of thin film stacks in VLSI structures
1998 ◽
Vol 11
(3)
◽
pp. 458-464
◽
Keyword(s):
Keyword(s):
Keyword(s):
2012 ◽
Vol 212
(7)
◽
pp. 1453-1462
◽
1993 ◽
Vol 35
(3)
◽
pp. 239-241
◽
Keyword(s):
2015 ◽
Vol 1
(2)
◽
pp. 57-65
2011 ◽